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Volumn 396, Issue 5, 2010, Pages 1905-1911

High-resolution investigations of ripple structures formed by femtosecond laser irradiation of silicon

Author keywords

Amorphous silicon; Electron microscopy; Laser ablation; Ripple structure

Indexed keywords

ABLATION THRESHOLDS; CRYSTALLINE AND AMORPHOUS SILICON; CRYSTALLINE PHASIS; FEMTOSECOND LASER IRRADIATION; HIGH RESOLUTION; MULTI-SHOT IRRADIATION; PERIODIC MICROSTRUCTURE; RIPPLE STRUCTURE; SELF-ORGANIZED; SEM; SI(1 0 0); SINGLE SHOTS; STRUCTURAL INVESTIGATION; STRUCTURAL MODIFICATIONS; TARGET SURFACE;

EID: 77949264209     PISSN: 16182642     EISSN: 16182650     Source Type: Journal    
DOI: 10.1007/s00216-009-3342-3     Document Type: Article
Times cited : (75)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.