On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses

Journal of Applied Physics

Volumn 106, Issue 10, 2009, Pages

  Bonse, Jörn ^a   Rosenfeld, Arkadi ^b   Krüger, Jörg ^a  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

^b MAX BORN INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CENTRAL WAVELENGTH; DENSE ELECTRON-HOLE PLASMAS; DRUDE MODELS; FEMTOSECOND LASER PULSE; FEMTOSECONDS; FIRST-PRINCIPLES THEORY; FLUENCE DEPENDENCE; INITIAL STAGES; LASER WAVELENGTH; LASER-INDUCED PERIODIC SURFACE STRUCTURES; PERIODIC SURFACES; PULSE DURATIONS; SINGLE CRYSTALLINE SILICON; SURFACE PLASMON POLARITONS; THEORETICAL APPROACH;

IRRADIATION; LASER PULSES; LASERS; OPTICAL PROPERTIES; PERIODIC STRUCTURES; PHONONS; PHOTONS; PLASMONS; QUANTUM THEORY; SOLIDS; SURFACE STRUCTURE;

PULSED LASER APPLICATIONS;

EID: 71749118353     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3261734     Document Type: Article

References (23)

1. M. Birnbaum, J. Appl. Phys. 0021-8979 36, 3688 (1965). 10.1063/1.1703071
2. J. Bonse, S. Baudach, J. Krüger, W. Kautek, and M. Lenzner, Appl. Phys. A: Mater. Sci. Process. 0947-8396 74, 19 (2002). 10.1007/s003390100893 (Pubitemid 41200758)
3. G. Daminelli, J. Krüger, and W. Kautek, Thin Solid Films 0040-6090 467, 334 (2004). 10.1016/j.tsf.2004.04.043
4. J. Bonse, M. Munz, and H. Sturm, J. Appl. Phys. 0021-8979 97, 013538 (2005). 10.1063/1.1827919 (Pubitemid 40183130)
5. F. Costache, S. Kouteva-Arguirova, and J. Reif, Appl. Phys. A: Mater. Sci. Process. 0947-8396 79, 1429 (2004). 10.1007/s00339-004-2803-y
6. T. H. R. Crawford and H. K. Haugen, Appl. Surf. Sci. 0169-4332 253, 4970 (2007). 10.1016/j.apsusc.2006.11.004 (Pubitemid 46329792)
7. M. Guillermin, F. Garrelie, N. Sanner, E. Audouard, and H. Soder, Appl. Surf. Sci. 0169-4332 253, 8075 (2007). 10.1016/j.apsusc.2007.02.093 (Pubitemid 47058706)
8. R. Wagner and J. Gottmann, J. Phys.: Conf. Ser. 1742-6588 59, 333 (2007). 10.1088/1742-6596/59/1/070
9. A. Y. Vorobyev, V. S. Makin, and C. Guo, J. Appl. Phys. 0021-8979 101, 034903 (2007). 10.1063/1.2432288 (Pubitemid 46280939)
10. J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, Phys. Rev. B 0163-1829 27, 1141 (1983). 10.1103/PhysRevB.27.1141
11. D. Dufft, A. Rosenfeld, S. K. Das, R. Grunwald, and J. Bonse, J. Appl. Phys. 0021-8979 105, 034908 (2009). 10.1063/1.3074106
12. M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, Phys. Rev. B 0163-1829 79, 125436 (2009). 10.1103/PhysRevB.79.125436
13. J. Bonse, H. Sturm, D. Schmidt, and W. Kautek, Appl. Phys. A: Mater. Sci. Process. 0947-8396 71, 657 (2000). 10.1007/s003390000585
14. T. Q. Jia, H. X. Chen, M. Huang, F. L. Zhao, J. R. Qiu, R. X. Li, Z. Z. Xu, X. K. He, J. Zhang, and H. Kuroda, Phys. Rev. B 0163-1829 72, 125429 (2005). 10.1103/PhysRevB.72.125429 (Pubitemid 43028931)
15. J. Bonse, K. -W. Brzezinka, and A. J. Meixner, Appl. Surf. Sci. 0169-4332 221, 215 (2004). 10.1016/S0169-4332(03)00881-X
16. J. Bonse, Appl. Phys. A: Mater. Sci. Process. 0947-8396 84, 63 (2006). 10.1007/s00339-006-3583-3 (Pubitemid 43742185)
17. K. Sokolowski-Tinten and D. von der Linde, Phys. Rev. B 0163-1829 61, 2643 (2000). 10.1103/PhysRevB.61.2643
18. Handbook of Optical Constants of Solids, edited by, E. D. Palik, (Academic, Orlando, FL, 1985).
19. A. J. Sabbah and D. M. Riffe, Phys. Rev. B 0163-1829 66, 165217 (2002). 10.1103/PhysRevB.66.165217
20. F. Keilmann and Y. H. Bai, Appl. Phys. A: Mater. Sci. Process. 0947-8396 29, 9 (1982). 10.1007/BF00618110
21. G. A. Martsinovskii, G. D. Shandybina, D. S. Smirnov, S. V. Zabotnov, L. A. Golovan, V. Yu. Timoshenko, and P. K. Kashkarov, Opt. Spectrosc. 0030-400X 105, 67 (2008). 10.1134/S0030400X08070114
22. Capillary surface waves frozen in the residual melt layer can be ruled out here as a mechanism for the formation of the surface relief structure: D. K. Fork, G. B. Anderson, J. B. Boyce, R. I. Johnson, and P. Mei [Appl. Phys. Lett. 0003-6951 68, 2138 (1996)] showed that capillary waves of cap ∼800 nm wavelength excited on an ∼100 nm thick liquid layer have a propagation distance of less than 2 μm before they are damped-a value which is significantly smaller than the maximum radial extent of ∼10 μm over which the surface relief pattern can be observed in Figs.. 10.1063/1.115610 (Pubitemid 126688494)
23. B. R. Tull, J. E. Carey, E. Mazur, J. P. MacDonald, and S. M. Yalisove, MRS Bull. 0883-7694 31, 626 (2006).