Sol-Gel Based Soft Lithography and Piezoresponse Force Microscopy of Patterned Pb(Zr0.52Ti0.48)O3 Microstructures

Journal of Materials Science and Technology

Volumn 26, Issue 5, 2010, Pages 439-444

  Lan, Lining ^a   Xie, Shuhong ^a,c   Tan, Li ^b   Li, Jiangyu ^c  

^a XIANGTAN UNIVERSITY   (China)

^b UNIVERSITY OF NEBRASKA LINCOLN   (United States)

^c University of Washington   (United States)

Author keywords

Pb(Zr0.52Ti0.48)O3; Piezoresponse force microscopy; Soft lithography

Indexed keywords

CRYSTALLOGRAPHY; FERROELECTRIC FILMS; FERROELECTRICITY; LEAD COMPOUNDS; LEAD METALLOGRAPHY; LITHOGRAPHY; MICROSTRUCTURE; MOLDS; PEROVSKITE; SCANNING PROBE MICROSCOPY; SOL-GEL PROCESS; SOL-GELS; ZIRCONIUM COMPOUNDS;

DEVICE APPLICATION; FEATURE SIZES; PATTERN TRANSFERS; PATTERNED FILMS; PEROVSKITE STRUCTURES; PIEZORESPONSE; PIEZORESPONSE FORCE MICROSCOPY; SOFT LITHOGRAPHY;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;

EID: 79955395245     PISSN: 10050302     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1005-0302(10)60069-2     Document Type: Article

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