Embedded ferroelectric nanostructure arrays

Nanotechnology

Volumn 20, Issue 7, 2009, Pages

  Clemens, S ^a   Rohrig S ^b   Rudiger A ^c   Schneller, T ^a   Waser, R ^a,b  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

^c INRS EMT   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE AREAS; CHEMICAL SOLUTION DEPOSITIONS; COERCIVE FIELDS; DISPLACEMENT CURRENTS; FERROELECTRIC CAPACITORS; FERROELECTRIC NANOSTRUCTURES; FIGURES OF MERITS; HIGH DENSITIES; IDENTICAL STRUCTURES; LATERAL DIMENSIONS; LOW-K DIELECTRICS; MATRIXES; NANO-ISLANDS; NANO-SCALE; NON-VOLATILE DATUM; POLISHING TIME; SCANNING PROBES; SPIN-ON GLASS; TIME CONTROLS;

CHEMICAL MECHANICAL POLISHING; ELECTRODES; ELECTROLYTIC CAPACITORS; FERROELECTRIC MATERIALS; FERROELECTRICITY; POLISHING; SPIN GLASS;

CHEMICAL POLISHING;

NANOMATERIAL; TITANIUM DIOXIDE;

ARTICLE; ELECTRIC POTENTIAL; ELECTRON BEAM; NANOANALYSIS; NANOARRAY; NANOTECHNOLOGY; PIEZOELECTRICITY; PRIORITY JOURNAL;

EID: 65249122524     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/7/075305     Document Type: Article

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