Combined PIC-MCC approach for fast simulation of a radio frequency discharge at a low gas pressure

Plasma Sources Science and Technology

Volumn 13, Issue 2, 2004, Pages 315-320

  Schweigert, I V ^a   Schweigert, V A ^a  

^a KHRISTIANOVICH INSTITUTE OF THEORETICAL AND APPLIED MECHANICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; ELECTRIC FIELD EFFECTS; INTEGRATION; KINETIC THEORY; MATHEMATICAL MODELS; MAXWELL EQUATIONS; MONTE CARLO METHODS; PLASMA DENSITY; POISSON EQUATION; PROBLEM SOLVING;

ELECTRON HEATING; GAS DISCHARGES; MONTE CARLO COLLISIONS (MCC); RADIO FREQUENCY DISCHARGES;

INDUCTIVELY COUPLED PLASMA;

EID: 2942622048     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/13/2/018     Document Type: Article

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