Single-mode and polarization-independent silicon-on-insulator waveguides with small cross section

Journal of Lightwave Technology

Volumn 23, Issue 6, 2005, Pages 2103-2111

  Chan, Seong Phun ^a   Png, Ching Eng ^b   Lim, Soon Thor ^a   Reed, Graham T ^a   Passaro, Vittorio M N ^c  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b INSTITUTE OF HIGH PERFORMANCE COMPUTING   (Singapore)

^c POLITECNICO DI BARI   (Italy)

Author keywords

Polarization independence; Rib waveguides; Silicon on insulator (SOI); Single mode condition (SMC)

Indexed keywords

APPROXIMATION THEORY; BIREFRINGENCE; COMPUTER SIMULATION; FAST FOURIER TRANSFORMS; FINITE ELEMENT METHOD; LIGHT POLARIZATION; LIGHT PROPAGATION; OPTICAL FIBER FABRICATION; SILICON ON INSULATOR TECHNOLOGY; SINGLE MODE FIBERS;

POLARIZATION INDEPENDENCE; RIB WAVEGUIDES; SINGLE MODE CONDITION (SMC);

OPTICAL WAVEGUIDES;

EID: 22444441069     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2005.849883     Document Type: Article

References (19)

1. C. E. Png, S. P. Chan, S. T. Lim, and G. T. Reed, "Optical phase modulators for MHz and GHz modulation in silicon-on-insulator (SOI)," J. Lightw. Technol., vol. 22, no. 6, pp. 1573-1582, Jun. 2004.
2. W. R. Headley, G. T. Reed, A. Liu, M. Paniccia, and S. Howe, "Polarization independent optical ring resonator on silicon-on-insulator," Appl. Phys. Lett., vol. 85, pp. 5523-5525, Nov. 2004.
3. S. P. Chan, V. M. N. Passaro, S. T. Lim, C. E. Png, and G. T. Reed, "Characterization of integrated Bragg gratings on SOI rib waveguides," in Proc. SPIE, vol. 5248, 2003, pp. 273-283.
4. O. Boyraz and B. Jalali, "Demonstration of a silicon Raman laser," Opt. Express, vol. 12, pp. 5269-5273, Oct. 2004.
5. 2," IEEE J. Quantum Electron., vol. 27, no. 8, pp. 1971-1974, Aug. 1991.
6. S. P. Pogossian, L. Vescan, and A. Vonsovici, "The single-mode condition for semiconductor rib waveguides with large cross section," J. Lightw. Technol., vol. 16, no. 10, pp. 1851-1853, Oct. 1998.
7. O. Powell, "Single-mode condition for silicon rib waveguides," J. Lightw. Technol., vol. 20, no. 10, pp. 1851-1855, Oct. 2002.
8. L. Vivien, S. Laval, B. Dumont, S. Lardenois, A. Koster, and E. Cassan, "Polarization-independent single-mode rib waveguides on silicon-on-insulator for telecommunication wavelengths," Opt. Commun., vol. 210, pp. 43-49, Sep. 2002.
9. J. Lousteau, D. Furniss, A. Seddon, T. M. Benson, A. Vukovic, and P. Sewell, "The single-mode condition for silicon-on-insulator optical rib waveguides with large cross section," J. Lightw. Technol., vol. 22, no. 8, pp. 1923-1929, Aug. 2004.
10. "Beamprop," Rsoft Design Group, Inc., Ossining, NY.
11. "FEMLAB," COMSOL, Inc., Burlington, MA.
12. W. N. Ye, D. X. Xu, S. Janz, P. Cheben, A. Delage, M. J. Picard, B. Lamontagne, and N. G. Tarr, "Stress-induced birefringence in silicon-on-insulator (SOI) waveguides," in Proc. SPIE, vol. 5357, Jul. 2004, pp. 57-66.
13. A. G. Rickman, G. T. Reed, and F. Namavar, "Silicon-on-insulator optical rib waveguide loss and mode characteristics," J. Lightw. Technol., vol. 12, no. 10, pp. 1771-1776, Oct. 1994.
14. A. Sakai, T. Fukazawa, and T. Baba, "Low loss ultra-small branches in a silicon photonics wire waveguide," IEICE Trans. Electron., vol. E85-C, pp. 1033-1038, 2002.
15. 2 waveguide: Experiments and model," Appl. Phy. Lett., vol. 77, pp. 1617-1619, 2000.
16. J. Wong, J. Well, C. Whiting, C. Yu, B. Porth, J. Hart III, G. Matteson, H. Mochiki, and M. Hagihara, "A hardmask STI etching process for 0.13 μm logic technology and beyond," in IEEE/SEMI Adv. Semiconductor Manufacturing Conf., 2001, pp. 85-94.
17. International Technology Roadmap for Semiconductors (ITRS). [Online]. Available: http://public.itrs.net/
18. S. Bosch-Charpenay, X. Jiazhan, J. Haigis, P. A. Rosenthal, P. R. Solomon, and J. M. Bustillo, "Real-time etch-depth measurements of MEMS devices," J. Microelectromech. Syst., vol. 11, pp. 111-117, 2002.
19. M. Hankinson, T. Vincent, K. B. Irani, and P. P. Khargonekar, "Integrated real-time and run-to-run control of etch depth in reactive ion etching," IEEE Trans. Semicon. Manuf., vol. 10, no. 1, pp. 121-130, Feb. 1997.