SCOPUS 정보 검색 플랫폼

Journal of Alloys and Compounds

Volumn 509, Issue 20, 2011, Pages 6090-6095

Metalorganic chemical vapor deposition of Ti-O-C-N thin films using TBOT as a promising precursor

(5) Fouad, O A a Geioushy, R A a El Sheikh, S M a Khedr, M H b Ibrahim, I A a

a CENTRAL METALLURGICAL RESEARCH AND DEVELOPMENT INSTITUTE CMRDI (Egypt)

b Physics (Egypt)

Author keywords

MOCVD; SEM; Ti O C N thin films; XPS; XRD

Indexed keywords

MOCVD; SEM; TI-O-C-N THIN FILMS; XPS; XRD;

CARBON FILMS; DEPOSITION; GASES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NITROGEN; OXIDE MINERALS; OXYGEN; THIN FILMS; TITANIUM; TITANIUM CARBIDE; TITANIUM DIOXIDE; TITANIUM NITRIDE; VAPOR DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

PROCESS CONTROL;

EID: 79954425136 PISSN: 09258388 EISSN: None Source Type: Journal
DOI: 10.1016/j.jallcom.2011.03.030 Document Type: Article

Times cited : (8)

References (22)

1
- 9644252855
- A.C. Gallardo, M. Guerrero, N. Castillo, A.B. Soto, R. Fragoso, and J.G. Cabanas-Moreno Thin Solid Films 473 2005 68
- (2005) Thin Solid Films , vol.473 , pp. 68
- Gallardo, A.C.¹ Guerrero, M.² Castillo, N.³ Soto, A.B.⁴ Fragoso, R.⁵ Cabanas-Moreno, J.G.⁶

2
- 66049143451
- O.A. Fouad, A.K. Rumaiz, and S.I. Shah Thin Solid Films 517 2009 5689
- (2009) Thin Solid Films , vol.517 , pp. 5689
- Fouad, O.A.¹ Rumaiz, A.K.² Shah, S.I.³

3
- 16344373947
- L. Tong, and R.G. Reddy Scripta Mater. 52 2005 1253
- (2005) Scripta Mater. , vol.52 , pp. 1253
- Tong, L.¹ Reddy, R.G.²

4
- 30544432867
- J.C. Nable, S. Nosheen, S.L. Suib, and F.S. Galasso Surf. Coat. Technol. 200 2006 2821
- (2006) Surf. Coat. Technol. , vol.200 , pp. 2821
- Nable, J.C.¹ Nosheen, S.² Suib, S.L.³ Galasso, F.S.⁴

5
- 21844453909
- S. Shimada, Y. Takada, and J. Tsujino Surf. Coat. Technol. 199 2005 72
- (2005) Surf. Coat. Technol. , vol.199 , pp. 72
- Shimada, S.¹ Takada, Y.² Tsujino, J.³

6
- 33846640088
- D. Xiang, Y. Liu, Z. Zhao, H. Cao, S. Gao, and M. Tu J. Alloys Compd. 429 2007 264
- (2007) J. Alloys Compd. , vol.429 , pp. 264
- Xiang, D.¹ Liu, Y.² Zhao, Z.³ Cao, H.⁴ Gao, S.⁵ Tu, M.⁶

7
- 0042410704
- J.H. Hsieh, C. Li, W. Wu, and A.L.K. Tan J. Mater. Process. Technol. 140 2003 662
- (2003) J. Mater. Process. Technol. , vol.140 , pp. 662
- Hsieh, J.H.¹ Li, C.² Wu, W.³ Tan, A.L.K.⁴

8
- 38149048342
- D. Xiang, Y. Liu, S. Gao, and M. Tu Mater. Charact. 59 2008 241
- (2008) Mater. Charact. , vol.59 , pp. 241
- Xiang, D.¹ Liu, Y.² Gao, S.³ Tu, M.⁴

9
- 41849100399
- J.C. Sanchez-Lopez, D. Martinez, C.L. Cartes, and A. Fernandez Surf. Coat. Technol. 202 2008 4011
- (2008) Surf. Coat. Technol. , vol.202 , pp. 4011
- Sanchez-Lopez, J.C.¹ Martinez, D.² Cartes, C.L.³ Fernandez, A.⁴

10
- 0036131509
- O.A. Fouad, M. Yamazato, M. Era, M. Nagano, T. Hirai, and I. Usui J. Cryst. Growth 234 2002 440
- (2002) J. Cryst. Growth , vol.234 , pp. 440
- Fouad, O.A.¹ Yamazato, M.² Era, M.³ Nagano, M.⁴ Hirai, T.⁵ Usui, I.⁶

11
- 7544231033
- M. Takahashi, and S. Shimada Solid State Ionics 172 2004 249
- (2004) Solid State Ionics , vol.172 , pp. 249
- Takahashi, M.¹ Shimada, S.²

12
- 85058247928
- D.H. Kuo, and K.W. Huang Thin Solid Films 394 2001 81
- (2001) Thin Solid Films , vol.394 , pp. 81
- Kuo, D.H.¹ Huang, K.W.²

13
- 26044462857
- K. Shalini, S. Chandrasekaran, and S.A. Shivashankar J. Cryst. Growth 284 2005 388
- (2005) J. Cryst. Growth , vol.284 , pp. 388
- Shalini, K.¹ Chandrasekaran, S.² Shivashankar, S.A.³

14
- 1542335381
- B.H. Kim, J.Y. Lee, Y.H. Choba, M. Higuchi, and N. Mizutani Mater. Sci. Eng. B107 2004 289
- (2004) Mater. Sci. Eng. , vol.107 , pp. 289
- Kim, B.H.¹ Lee, J.Y.² Choba, Y.H.³ Higuchi, M.⁴ Mizutani, N.⁵

15
- 2342568993
- B. Arvan, A. Khakifirooz, R. Tarighat, S. Mohajerzadeh, A. Goodarzi, E.A. Soleimani, and E. Arzi Mater. Sci. Eng. B109 2004 17
- (2004) Mater. Sci. Eng. , vol.109 , pp. 17
- Arvan, B.¹ Khakifirooz, A.² Tarighat, R.³ Mohajerzadeh, S.⁴ Goodarzi, A.⁵ Soleimani, E.A.⁶ Arzi, E.⁷

16
- 34547650961
- D. Caschera, F. Federici, S. Kaciulis, L. Pandolfi, A. Cusma, and G. Padeletti Mater. Sci. Eng. C27 2007 1328
- (2007) Mater. Sci. Eng. , vol.27 , pp. 1328
- Caschera, D.¹ Federici, F.² Kaciulis, S.³ Pandolfi, L.⁴ Cusma, A.⁵ Padeletti, G.⁶

17
- 33750438112
- A.C. Fernandes, P. Carvalho, F. Vaz, S.L. Mendez, A.V. Machado, N.M.G. Parreira, J.F. Pierson, and N. Martin Thin Solid Films 515 2006 866
- (2006) Thin Solid Films , vol.515 , pp. 866
- Fernandes, A.C.¹ Carvalho, P.² Vaz, F.³ Mendez, S.L.⁴ MacHado, A.V.⁵ Parreira, N.M.G.⁶ Pierson, J.F.⁷ Martin, N.⁸

18
- 7644243614
- A. Belluci, D. Gozzi, and A. Latini Solid State Ionics 172 2004 369
- (2004) Solid State Ionics , vol.172 , pp. 369
- Belluci, A.¹ Gozzi, D.² Latini, A.³

19
- 0035881724
- D.H. Kuo, and K.W. Huang Thin Solid Films 394 2001 72
- (2001) Thin Solid Films , vol.394 , pp. 72
- Kuo, D.H.¹ Huang, K.W.²

20
- 33947712699
- A.C. Fernandes, F. Vaz, L. Cunha, N.M.G. Parreira, A. Cavaleiro, Ph. Goudeau, E. Le Bourhis, J.P. Riviere, D. Munteanu, B. Borcea, and R. Cozma Thin Solid Films 515 2007 5424
- (2007) Thin Solid Films , vol.515 , pp. 5424
- Fernandes, A.C.¹ Vaz, F.² Cunha, L.³ Parreira, N.M.G.⁴ Cavaleiro, A.⁵ Goudeau, P.⁶ Le Bourhis, E.⁷ Riviere, J.P.⁸ Munteanu, D.⁹ Borcea, B.¹⁰ Cozma, R.¹¹

21
- 44649151833
- P. Stefanov, M. Shipochka, P. Stefchev, Z. Raicheva, V. Lazarova, and L. Spassov J. Phys. 100 2008 012039
- (2008) J. Phys. , vol.100
- Stefanov, P.¹ Shipochka, M.² Stefchev, P.³ Raicheva, Z.⁴ Lazarova, V.⁵ Spassov, L.⁶

22
- 2942620730
- G. Soto Appl. Surf. Sci. 233 2004 115
- (2004) Appl. Surf. Sci. , vol.233 , pp. 115
- Soto, G.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.