Synthesis of Ti(C, N, O) coatings by unbalanced magnetron sputtering

Journal of Materials Processing Technology

Volumn 140, Issue 1-3 SPEC., 2003, Pages 662-667

  Hsieh, J H ^a   Li, C ^a   Wu, W ^b   Tan, A L K ^c  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^c SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

Hard coating; Magnetron sputtering; Ti(CNO); Wear and friction

Indexed keywords

COATINGS; FRICTION; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); WEAR RESISTANCE;

DEPOSITION RATES;

TITANIUM COMPOUNDS;

EID: 0042410704     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-0136(03)00773-8     Document Type: Conference Paper

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