TiO2 anatase thin films deposited by spray pyrolysis of an aerosol of titanium diisopropoxide

Thin Solid Films

Volumn 473, Issue 1, 2005, Pages 68-73

  Conde Gallardo, A ^a   Guerrero, M ^a   Castillo, N ^a   Soto, A B ^a   Fragoso, R ^a   Cabanas Moreno J G ^b  

^a DEPARTAMENTO DE FÍSICA   (Mexico)

^b INSTITUTO POLITÉCNICO NACIONAL   (Mexico)

Author keywords

Atomic force microscopy; Organometallic vapor deposition; Spray pyrolysis; Synthesis and characterization; Titanium oxide; X ray diffraction

Indexed keywords

AEROSOLS; ATOMIC FORCE MICROSCOPY; CRYSTALLINE MATERIALS; DEPOSITION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PYROLYSIS; QUARTZ; SCANNING ELECTRON MICROSCOPY; SILICON; SURFACE ROUGHNESS; TITANIUM DIOXIDE; X RAY DIFFRACTION ANALYSIS;

ORGANOMETALLIC VAPOR DEPOSITION; SPRAY PYROLYSIS (SP); SYNTHESIS AND CHARACTERIZATION;

THIN FILMS;

EID: 9644252855     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.07.010     Document Type: Article

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