A trans-scaled nanofabrication using 3D diffuser lithography, metal molding and nano-imprinting

Journal of Micromechanics and Microengineering

Volumn 21, Issue 4, 2011, Pages

  Kim, Dong Haan ^a,b   Lee, Joo Hyung ^a   Lee, Hyung Suk ^a,c   Yoon, Jun Bo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Doosan Heavy Industries and Construction Co Ltd   (South Korea)

^c SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

3D DIFFUSER LITHOGRAPHY; CONTACT LITHOGRAPHY; DOT DIAMETER; IS COSTS; MASS PRODUCTION; MICRO TECHNOLOGY; MICRO-LITHOGRAPHY; NANO PATTERN; NANO-DOT ARRAYS; NANO-IMPRINTING; NANOFABRICATION; NANOPATTERNING; NANOSCALE APPLICATIONS; OPTICAL DIFFUSERS; PHOTORESIST MOLDS; SUBMICRON-SIZED;

DIFFUSERS (OPTICAL); LITHOGRAPHY; MACHINERY; MOLDS; PHOTORESISTS;

METAL MOLDING;

EID: 79953650416     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/4/045025     Document Type: Article

References (28)

1. Ito T and Okazaki S 2000 Pushing the limits of lithography Nature 406 1027-31
2. Silverman J P 1998 Challenges and progress in x-ray lithography J. Vac. Sci. Technol. B 16 3137-41 (Pubitemid 128600892)
3. Corbierre M K, Beerens J and Lennox R B 2005 Gold nanoparticles generated by electron beam lithography of gold(I)-thiolate thin films Chem. Mater. 17 5774-9 (Pubitemid 41692234)
4. Melngailis J, Mondelli A A, Berry I L and Mohondro R 1998 A review of ion projection lithography J. Vac. Sci. Technol. B 16 927-57 (Pubitemid 128599485)
5. Ginger D S, Zhang H and Mirkin C A 2004 The evolution of dip-pen nanolithography Angew. Chem. Int. Edn 43 30-45 (Pubitemid 38063469)
6. Ruzette A V and Leibler L 2005 Block copolymers in tomorrow's plastics Nat. Mater. 4 19-31 (Pubitemid 40020997)
7. Fasolka M J and Mayes A M 2001 Block copolymer thin films: physics and applications Annu. Rev. Mater. Res. 31 323-55 (Pubitemid 33073853)
8. Spatz J, Mömer S, Möller M, Kocher M, Neher D and Wegner G 1998 Controlled mineralization and assembly of hydrolysis-based nanoparticles in organic solvents combining polymer micelles and microwave techniques Adv. Mater. 10 473-5 (Pubitemid 128542868)
9. Winkleman A, Gates B D, McCarty L S and Whitesides G M 2005 Directed self-assembly of spherical particles on patterned electrodes by an applied electric field Adv. Mater. 17 1507-11 (Pubitemid 40833933)
10. Cui Y, Bjork M T, Liddle J A, Sonnichsen C, Boussert B and Alivisatos A P 2004 Integration of colloidal nanocrystals into lithographically patterned devices Nano Lett. 4 1093-8 (Pubitemid 38859988)
11. Kumacheva E, Garstecki P, Wu H K and Whitesides G M 2003 Two-dimensional colloid crystals obtained by coupling of flow and confinement Phys. Rev. Lett. 91 128301
12. Fudouzi H, Kobayashi M and Shinya N 2002 Assembly of microsized colloidal particles on electrostatic regions patterned through ion beam irradiation Langmuir 18 7648-52 (Pubitemid 35383185)
13. Liu S, Tok J B H, Locklin J and Bao Z 2006 Assembly and alignment of metallic nanorods on surface with patterned wettability Small 2 1448-53 (Pubitemid 44786889)
14. Gu Z Z, Fujishima A and Sato O 2002 Patterning of a colloidal crystal film on a modified hydrophilic and hydrophobic surface Angew. Chem. Int. Edn 114 2171-4
15. Austin M D, Ge H, Wu W, Li M, Yu Z, Wasserman D, Lyon S A and Chou S Y 2004 Fabrication of 5 nm linewidth and 14 nm pitch features by nanoimprint lithography Appl. Phys. Lett. 84 5299-301
16. Colburn M, Johnson S, Damle S, Bailey T, Choi B, Wedlake M, Michaelson T, Sreenivasan S V, Ekerdt J and Willson C B 1999 Step and flash imprint lithography: a new approach to high-resolution patterning Proc. SPIE 3676 379-89
17. Huang X D, Bao L-R, Cheng X, Guo L J, Pang S W and Yee A F 2002 Reversal imprinting by transferring polymer from mold to substrate J. Vac. Sci. Technol. B 20 2872-6 (Pubitemid 36072524)
18. Borzenko T, Tormen M, Schmidt G, Molenkamp L W and Janssen H 2001 Polymer bonding process for nanolithography Appl. Phys. Lett. 79 2246-8 (Pubitemid 33600815)
19. Chang S-I and Yoon J-B 2004 Shape-controlled high fill-factor microlens arrays fabricated with a 3D diffuser lithography and plastic replication method Opt. Express 12 6366-71 (Pubitemid 40067617)
20. Chang S-I, Yoon J-B, Kim H, Kim J-J, Lee B-K and Shin D-H 2006 Microlens array diffuser for a light emitting diode backlight system Opt. Lett. 31 3016-8 (Pubitemid 44664594)
21. Lee J-H, Lee H-S, Lee B-K, Choi W-S, Choi H-Y and Yoon J-B 2007 Simple LCD backlight unit comprising only a single-sheet micropatterned polydimethylsiloxane (PDMS) light-guide plate Opt. Lett. 32 2665-7 (Pubitemid 351302923)
22. Lee J-H, Choi W-S, Lee K-H and Yoon J-B 2008 A simple and effective fabrication method of various 3D microstructures: backside 3D diffuser lithography J. Micromech. Microeng. 18 125015
23. Lee J-H, Choi J-Y, Bae S-M and Yoon J-B 2007 A novel LCD backlight unit using a light-guide plate with high fill-factor microlens array and a conical microlens array sheet SID Symp. Digest Tech. Papers vol 38 pp 465-8 (Pubitemid 47258727)
24. Zhao Y P, Ye D X, Wang G C and Lu T M 2002 Novel nano-column and nano-flower arrays by glancing angle deposition Nano Lett. 2 351-4
25. Jia F, Zhang L, Shang X and Yang Y 2008 Non-aqueous sol-gel approach towards the controllable synthesis of nickel nanospheres, nanowires, and nanoflowers Adv. Mater. 20 1050-4
26. Kim J-H, Huang X-J and Choi Y-K 2008 Controlled synthesis of gold nanocomplex arrays by a combined top-down and bottom-up approach and their electrochemical behavior J. Phys. Chem. C 112 12747-53
27. Hiller J A, Mendelsohn J D and Rubner M F 2002 Reversibly erasable nanoporous anti-reflection coatings from polyelectrolyte multilayers Nat. Mater. 1 59-63
28. Hattori H 2001 Anti-reflection surface with particle coating deposited by electrostatic attraction Adv. Mater. 13 51-4 (Pubitemid 32159641)