A simple and effective fabrication method for various 3D microstructures: Backside 3D diffuser lithography

Journal of Micromechanics and Microengineering

Volumn 18, Issue 12, 2008, Pages

  Lee, Joo Hyung ^a   Choi, Won Seok ^a   Lee, Kyung Ho ^a   Yoon, Jun Bo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSERS (FLUID); FABRICATION; GLASS; LITHOGRAPHY; METALLOGRAPHIC MICROSTRUCTURE; MICROLENSES; MICROOPTICS; MICROSTRUCTURE; SPIN GLASS;

3D DIFFUSER LITHOGRAPHIES; 3D MICROSTRUCTURES; FABRICATION METHODS; GLASS SUBSTRATES; KEY PROCESSES; MICROBALL LENSES; NEGATIVE PHOTORESISTS; OPTICAL COMPONENTS; OPTICAL DIFFUSERS; PARAMETER STUDIES; PLANAR MICROLENS; SELF-ALIGNED; SIDEWALL ANGLES; ULTRA VIOLETS; UV EXPOSURES;

THREE DIMENSIONAL;

EID: 58149326763     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/12/125015     Document Type: Article

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