Ultra-low-power multiplexed electronic driver for high resolution deformable mirror systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7930, Issue , 2011, Pages

  Horenstein, Mark N ^a   Sumner, Robert ^a   Miller, Preston ^a   Bifano, Thomas ^b   Stewart, Jason ^b   Cornelissen, Steven ^b  

^a BOSTON UNIVERSITY   (United States)

^b Boston Micromachines   (United States)

Author keywords

actuator; driver; high voltage; low power; MEMS; multiplexer

Indexed keywords

ACTUATOR ARRAYS; ADAPTIVE OPTICS SYSTEMS; ADDRESSING SCHEME; COMPACT PACKAGE; D/A CONVERTERS; DEFORMABLE MIRRORS; DRIVER; ELECTRONIC DRIVERS; HIGH RESOLUTION; HIGH-VOLTAGE DRIVERS; HIGH-VOLTAGES; LOW POWER; MEMS DEFORMABLE MIRROR; MULTIPLE-CHANNEL; MULTIPLEXER; OPERATIONAL POWER; ORDER OF MAGNITUDE; ORDERS OF MAGNITUDE; OTHER APPLICATIONS; ROW-COLUMN; SPACE-BASED; SYSTEM MODIFICATIONS; ULTRA-LOW POWER;

ACTUATORS; DEFORMATION; LASER PULSES; MIRRORS; MULTIPLEXING; MULTIPLEXING EQUIPMENT; VOLTAGE REGULATORS;

MOEMS;

EID: 79953644738     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.876404     Document Type: Conference Paper

References (18)

1. Bifano, TG, Bierden P, Cornelissen SA, "MEMS deformable mirrors for space and defense applications," Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II, Orlando, FL, USA, SPIE, [6959], 695914-695917, (2008)
2. Bifano T, "Shaping light: MOEMS deformable mirrors for microscopes and telescopes," MEMS Adaptive Optics IV, San Francisco, California, USA, SPIE, [7595], 759502-759508, (2010).
3. Stewart JB, Bifano TG, Cornelissen S, Bierden P, Levine BM, Cook T, "Design and development of a 331-segment tip-tilt-piston mirror array for space-based adaptive optics," Sensors and Actuators a-Physical, [138], 230-238, (2007).
4. Cornelissen SA, Bierden PA, Bifano TG, "A 4096 element continuous facesheet MEMS deformable mirror for high-contrast imaging," MEMS Adaptive Optics II, San Jose, CA, USA, SPIE, [6888], 68880V-68810, (2008).
5. Bifano T, "Shaping light: MOEMS deformable mirrors for microscopes and telescopes," MEMS Adaptive Optics IV, San Francisco, California, USA, SPIE, [7595], 759502-759508, (2010).
6. Bifano TG, Bierden P, Cornelissen SA, "MEMS deformable mirrors for space and defense applications," Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II, Orlando, FL, USA, SPIE, [6959], 695914-695917, (2008).
7. Bifano TG, Mali RK, Dorton JK, Perreault J, Vandelli N, Horenstein MN, Castanon DA, "Continuous-membrane surface-micromachined silicon deformable mirror," Optical Engineering, [36], 1354-1360, (1997).
8. Bifano TG, Perreault J, Mali RK, Horenstein MN, " Microelectromechanical deformable mirrors," Journal of Selected Topics in Quantum Electronics, [5], 83-89, (1999).
9. Cornelissen SA, Bierden PA, Bifano TG, Lam CV, "4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging," Journal of Micro/Nanolithography, MEMS and MOEMS, 8, 031308-031308, (2009).
10. Horenstein MN, Bifano TG, Mali RK, Vandelli N, "Electrostatic effects in micromachined actuators for adaptive optics," Journal of Electrostatics, [42], 69-81, (1997).
11. Mali RK, Bifano TG, Vandelli N, Horenstein MN, "Development of microelectromechanical deformable mirrors for phase modulation of light," Optical Engineering, [36], 542-548, (1997).
12. Perreault JA, Bifano TG, Levine BM, Horenstein MN, "Adaptive optic correction using microelectromechanical deformable mirrors," Optical Engineering, [41], 561-566, (2002).
13. Stewart JB, Diouf A, Zhou YP, Bifano TG, "Open-loop control of a MEMS deformable mirror for large-amplitude wavefront control," Journal of the Optical Society of America a-Optics Image Science and Vision, [24], 3827-3833, (2007).
14. Stewart JB, Bifano TG, Cornelissen S, Bierden P, Levine BM, Cook T, "Design and development of a 331-segment tip-tilt-piston mirror array for space-based adaptive optics," Sensors and Actuators a-Physical, [138], 230-238, (2007).
15. http://planetquest.jpl.nasa.gov/
16. Earth-like exoplanets: the science of nasa's navigator program, JPL Publication 06-5, Rev A (2006)
17. Horenstein, MN [Microelectronic Circuits and Devices, 2nd Ed.], Prentice-Hall, Upper Saddle River, NJ, 905-906, (1996).
18. Sedra, AS and Smith, KC [Microelectronic Circuits, 4th Ed.], Oxford Univ. Press, New York & Oxford, 305-306 (1998).