MEMS deformable mirrors for space and defense applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6959, Issue , 2008, Pages

  Bifano, T G ^a,b   Bierden, Paul ^b   Cornelissen, Steven A ^b  

^a BOSTON UNIVERSITY   (United States)

^b BOSTON MICROMACHINES CORPORATION   (United States)

Author keywords

Adaptive optics; Deformable mirror; MEMS; Wavefront correction

Indexed keywords

DEFORMABLE MIRRORS; WAVEFRONT CORRECTION;

LIGHT MODULATION; MEMS; MIRRORS; WAVEFRONTS;

ADAPTIVE OPTICS;

EID: 44349186067     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.781676     Document Type: Conference Paper

References (5)

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2. Julia W. Evans, Bruce Macintosh, Lisa Poyneer, Katie Morzinski, Scott Severson, Daren Dillon, Donald Gavel, and Layra Reza, "Demonstrating sub-nm closed loop MEMS flattening," Optics Express, Vol. 14 Issue 12, pp. 5558-5570, 2006.
3. Bifano, T., Perreault, J., Mali, R., et al., "Microelectromechanical deformable mirrors", IEEE J. of Selected Topics in Quantum Electronics, 5 (1): 83-89 Jan-Feb 1999.
4. Cornelissen, S. A., Bierden, P. A., and Bifano, T. G., "Development of a 4096 element MEMS continuous membrane deformable mirror for high contrast astronomical imaging," Proc. SPIE Vol. 6306, Advanced Wavefront Control: Methods, Devices, and Applications IV, Michael K. Giles, John D. Gonglewski, Richard A. Carreras, Editors, Aug, 2006
5. Stewart J.B., Bifano T.G., Cornelissen S., Bierden P., Levine B. M., Cook T., "Design and development of a 331-segment tip-tilt-piston mirror array for space-based adaptive optics," Sensors and Actuators A- Physical [138] pp. 230-238, 2007