A 4096 element continuous facesheet MEMS deformable mirror for high-contrast imaging

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6888, Issue , 2008, Pages

  Cornelissen, S A ^a   Bierden, P A ^a   Bifano, T G ^a,b  

^a BOSTON MICROMACHINES CORPORATION   (United States)

^b BOSTON UNIVERSITY   (United States)

Author keywords

Adaptive optics; Deformable mirror; MEMS; Wavefront correction

Indexed keywords

DEFORMABLE MIRRORS; FRAME RATES; WAVEFRONT CORRECTION;

ADAPTIVE OPTICS; IMAGING SYSTEMS; POLYSILICON; SURFACE MICROMACHINING; WAVEFRONTS;

MEMS;

EID: 41149122047     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.770620     Document Type: Conference Paper

References (4)

1. Macintosh, B., Graham, J., Oppenheimer, B., Poyneer, L., Sivaramakrishnan, A., Veran, J., "MEMS-Based Extreme Adaptive Optics for Planet Detection", Proc. SPIE Vol. 6113, 611308 (Jan. 23, 2006)
2. Evans, J., Morzinski, K., Severson, S., Poyneer, L. Macintosh, B., Dillon, D., Reza, L., Gavel, D., Palmer, D., Olivier, S., and Bierden, P, "Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror", Proc. SPIE Vol. 6113, 611301 (Jan. 23, 2006)
3. Perreault, J. A., Bifano, T. G., Levine, B.M., and Horenstein, M., "Adaptive optic correction using microelectromechanical deformable mirrors," Opt. Eng. [41]5, pp. 561-566, 2002
4. Bifano, T., Perreault, J., Mali, R., et al., "Microelectromechanical deformable mirrors", IEEE J. of Selected Topics in Quantum Electronics, 5 (1): 83-89 Jan-Feb 1999.