High quality factor etchless silicon photonic ring resonators

Optics Express

Volumn 19, Issue 7, 2011, Pages 6284-6289

  Luo, Lian Wee ^a   Wiederhecker, Gustavo S ^a   Cardenas, Jaime ^a   Poitras, Carl ^a   Lipson, Michal ^a  

^a Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; OPTICAL RESONATORS; PHOTONIC DEVICES; PLASMA ETCHING;

FABRICATION PROCESS; HIGH QUALITY FACTORS; INPUT AND OUTPUTS; INTRINSIC QUALITY FACTORS; NANO-TAPERS; RING RESONATOR; SILICON LAYER; SILICON PHOTONICS; THERMAL OXIDATION;

SILICON OXIDES;

SILICON;

ARTICLE; CHEMISTRY; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; NANOTECHNOLOGY; OPTICAL INSTRUMENTATION; SURFACE PLASMON RESONANCE; TRANSDUCER;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; NANOTECHNOLOGY; OPTICAL DEVICES; SILICON; SURFACE PLASMON RESONANCE; TRANSDUCERS;

EID: 79953190091     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.19.006284     Document Type: Article

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