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Volumn 87, Issue 23, 2005, Pages 1-3
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Low-loss quasi-planar ridge waveguides formed on thin silicon-on-insulator
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Author keywords
[No Author keywords available]
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Indexed keywords
OPTICAL LITHOGRAPHY;
QUASI-PLANAR RIDGE WAVEGUIDES;
RESONATOR CONFIGURATION;
SILICON-ON-INSULATOR MATERIAL;
CRACK PROPAGATION;
LITHOGRAPHY;
RESONATORS;
STRUCTURES (BUILT OBJECTS);
WAVEGUIDES;
SILICON ON INSULATOR TECHNOLOGY;
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EID: 28444438837
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2139836 Document Type: Article |
Times cited : (55)
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References (12)
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