Microphotonics devices based on silicon microfabrication technology

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 11, Issue 1, 2005, Pages 232-239

  Tsuchizawa, Tai ^a   Yamada, Koji ^a   Fukuda, Hiroshi ^a   Watanabe, Toshifumi ^a   Takahashi, Jun Ichi ^a   Takahashi, Mitsutoshi ^a   Shoji, Tetsufumi ^a   Tamechika, Emi ^a   Itabashi, Sei Ichi ^a   Morita, Hirofumi ^a  

^a NTT CORPORATION   (Japan)

Author keywords

Fabrication technology; Integrated optical circuit; Microphotonics device; Silicon photonics; Silicon wire waveguide; Silicon on insulator (SOI); Spot size converter

Indexed keywords

ANALOG TO DIGITAL CONVERSION; FIBER OPTICS; INTEGRATED CIRCUITS; MATHEMATICAL MODELS; NONLINEAR OPTICS; PHOTONS; RESONATORS; SILICON ON INSULATOR TECHNOLOGY; WAVE PROPAGATION; WAVEGUIDES;

FABRICATION TECHNOLOGY; INTEGRATED OPTICAL CIRCUIT; MICROPHOTONICS DEVICES; SILICON PHOTONICS; SILICON WIRE WAVEGUIDES; SPOT-SIZE CONVERTER;

SEMICONDUCTING SILICON;

EID: 20044392923     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2004.841479     Document Type: Article

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