Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography

IEEE Photonics Technology Letters

Volumn 16, Issue 5, 2004, Pages 1328-1330

  Dumon, Pieter ^a   Bogaerts, Wim ^a   Wiaux, Vincent ^a   Wouters, Johan ^b   Beckx, Stephan ^b   Van Campenhout, Joris ^a   Taillaert, Dirk ^a   Luyssaert, Bert ^a   Bienstman, Peter ^a   Van Thourhout, Dries ^a   Baets, Roel ^a  

^a GHENT UNIVERSITY   (Belgium)

^b IMEC   (Belgium)

Author keywords

High index contrast; Photonic wire; Ring resonators; Silicon on insulator (SOI) technology

Indexed keywords

CROSSTALK; DRY ETCHING; ELECTROMAGNETIC WAVE POLARIZATION; OPTICAL WAVEGUIDES; PHOTOLITHOGRAPHY; REFRACTIVE INDEX; RESONATORS; SEMICONDUCTING SILICON; SILICON ON INSULATOR TECHNOLOGY;

DEEP ULTRAVIOLET LITHOGRAPHY; PHOTONIC WIRES; RING RESONATORS; TRANSVERSE ELECTRIC MODES; TRANSVERSE MAGNETIC MODES;

INSULATED WIRE;

EID: 2442543204     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2004.826025     Document Type: Article

References (8)

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