Sub-micron optical waveguides for silicon photonics formed via the local oxidation of silicon (LOCOS)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6898, Issue , 2008, Pages

  Gardes, F Y ^a   Reed, G T ^a   Knights, A P ^b   Mashanovich, G ^a   Jessop, P E ^b   Rowe, L ^c   McFaul, S ^b   Bruce, D ^b   Tarr, N G ^c  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b MCMASTER UNIVERSITY   (Canada)

^c CARLETON UNIVERSITY   (Canada)

Author keywords

LOCOS; Rib waveguides; Silicon photonics; Silicon on insulator (SOI); Single mode condition

Indexed keywords

CHEMICAL OXYGEN DEMAND; ELECTRONICS INDUSTRY; INTEGRATED OPTOELECTRONICS; MICROELECTRONICS; OPTICAL WAVEGUIDES; OXIDATION; PHOTONIC DEVICES; PHOTONICS; SILICON; WAVEGUIDES;

(100) SILICON; (E ,3E) PROCESS; FABRICATION TECHNIQUES; LOCAL OXIDATION OF SILICON (LOCOS); OPTICAL (PET) (OPET); PHOTONIC WAVEGUIDES; SILICON PHOTONICS; SUB MICRON DIMENSIONS; SUB MICRONS;

NONMETALS;

EID: 42149147242     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.765383     Document Type: Conference Paper

References (5)

1. L. K. Rowe, M. Elsey, N. G. Tarr, A. P. Knights, and E. Post, "CMOS-compatible optical rib waveguides defined by local oxidation of silicon," Electronics Letters, vol. 43, pp. 392-393, 2007.
2. C. Kuang Yi, J. L. Moll, and J. Manoliu, "A bird's beak free local oxidation technology feasible for VLSI circuits fabrication," Electron Devices, IEEE Transactions on, vol. 29, pp. 536-540, 1982.
3. G. T. Reed and A. P. Knights, Silicon Photonics: An Introduction: John Wiley & Sons, Inc., 2004.
4. A. Sakai, G. Hara, and T. Baba, "Propagation characteristics of ultrahigh-Δ optical waveguide on silicon-on-insulator substrate," Japanese Journal of Applied Physics, Part 2: Letters, vol. 40, pp. 383-385, 2001.
5. D. Duchesne, R. Morandotti, P. Cheben, B. Lamontagne, D. Xu, and S. Janz, "Waveguide birefringence in asymmetric silicon-on-insulator nanowires," Montreal, Que.,