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Volumn 43, Issue 7, 2007, Pages 392-393
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CMOS-compatible optical rib waveguides defined by local oxidation of silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
BANDWIDTH;
CMOS INTEGRATED CIRCUITS;
ELECTRIC INSULATORS;
OXIDATION;
SILICON;
PLANARITY;
SINGLEMODE OPERATION;
TELECOMMUNICATIONS BAND;
OPTICAL WAVEGUIDES;
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EID: 34047135147
PISSN: 00135194
EISSN: None
Source Type: Journal
DOI: 10.1049/el:20073680 Document Type: Article |
Times cited : (48)
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References (7)
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