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Volumn 8, Issue 5, 1996, Pages 647-648
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0.1 dB/cm waveguide losses in single-mode SOI rib waveguides
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Author keywords
[No Author keywords available]
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Indexed keywords
ANTIREFLECTION COATINGS;
ELECTRIC LOSSES;
ETCHING;
GEOMETRY;
INTEGRATED OPTICS;
MASKS;
OPTICAL FIBER COUPLING;
OPTICAL VARIABLES MEASUREMENT;
PHOTOLITHOGRAPHY;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON ON INSULATOR TECHNOLOGY;
FIBER CHIP FIBER INSERTION LOSSES;
SINGLE MODE RIB WAVEGUIDES;
WAVEGUIDE LOSSES;
OPTICAL WAVEGUIDES;
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EID: 0030150744
PISSN: 10411135
EISSN: None
Source Type: Journal
DOI: 10.1109/68.491567 Document Type: Article |
Times cited : (149)
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References (6)
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