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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 29, Issue 2, 2011, Pages

Formation of Pd nanocrystals in titanium-oxide film by rapid thermal annealing of reactively cosputtered TiPdO films

(5) Huang, Wan Yi a Ding, Shi Jin a Chen, Hong Bing a Sun, Qing Qing a Zhang, David Wei a

a FUDAN UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

AS-DEPOSITED FILMS; COSPUTTERING; HIGH-CONTENT; NOVEL METHODS; PD TARGET; TIO; X-RAY PHOTOELECTRON SPECTROSCOPY SPECTRA;

OXIDE FILMS; OXYGEN; RAPID THERMAL ANNEALING; RAPID THERMAL PROCESSING; TITANIUM; TITANIUM OXIDES; X RAY PHOTOELECTRON SPECTROSCOPY;

NANOCRYSTALS;

EID: 79952430840 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3549112 Document Type: Article

Times cited : (2)

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