SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 29, Issue 2, 2011, Pages

Plasma-enhanced chemical vapor deposition synthesis of silica-silicone nanolaminates using a single precursor

(2) Patel, Rakhi P a Wolden, Colin A a

a Department of Metallurgical and Materials Engineering (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIGITAL CONTROL; FLEXIBLE SUBSTRATE; HEXAMETHYL DISILOXANE; HIGH-POWER; NANO-LAMINATES; NANOLAMINATE STRUCTURES; ORGANIC CONTENT; PLASMA POWER; POLYMER SUBSTRATE; RF-POWER; ROOM TEMPERATURE; SINGLE PRECURSORS;

CARBON FILMS; DIGITAL CONTROL SYSTEMS; MECHANICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICA; SILICONES; SPECTROSCOPIC ELLIPSOMETRY; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

PLASMA DEPOSITION;

EID: 79952390915 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3553149 Document Type: Article

Times cited : (12)

References (35)

1
- 0035242270
- 1616-301X, 10.1002/1616-3028(200102)11:1<15::AID-ADFM15>3.0.CO;2-A
- C. J. Brabec, N. S. Sariciftci, and J. C. Hummelen, Adv. Funct. Mater. 1616-301X 11, 15 (2001). 10.1002/1616-3028(200102)11:1<15::AID-ADFM15>3.0. CO;2-A
- (2001) Adv. Funct. Mater. , vol.11 , pp. 15
- Brabec, C.J.¹ Sariciftci, N.S.² Hummelen, J.C.³

2
- 44149110620
- 0079-6700, 10.1016/j.progpolymsci.2007.11.004
- M. C. Choi, Y. Kim, and C. S. Ha, Prog. Polym. Sci. 0079-6700 33, 581 (2008). 10.1016/j.progpolymsci.2007.11.004
- (2008) Prog. Polym. Sci. , vol.33 , pp. 581
- Choi, M.C.¹ Kim, Y.² Ha, C.S.³

3
- 33746306730
- 3 gas diffusion barriers grown by atomic layer deposition on polymers
- DOI 10.1063/1.2221912
- P. F. Carcia, R. S. McLean, M. H. Reilly, M. D. Groner, and S. M. George, Appl. Phys. Lett. 0003-6951 89, 031915 (2006). 10.1063/1.2221912 (Pubitemid 44107043)
- (2006) Applied Physics Letters , vol.89 , Issue.3 , pp. 031915
- Carcia, P.F.¹ McLean, R.S.² Reilly, M.H.³ Groner, M.D.⁴ George, S.M.⁵

4
- 0033706528
- 0734-2101, 10.1116/1.582156
- A. S. da Silva Sobrinho, G. Czeremuszkin, M. Latreche, and M. R. Wertheimer, J. Vac. Sci. Technol. A 0734-2101 18, 149 (2000). 10.1116/1.582156
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 149
- Da Silva Sobrinho, A.S.¹ Czeremuszkin, G.² Latreche, M.³ Wertheimer, M.R.⁴

5
- 4344631784
- 0734-2101, 10.1116/1.1705646
- M. Schaepkens, T. W. Kim, A. G. Erlat, M. Yan, K. W. Flanagan, C. M. Heller, and P. A. McConnelee, J. Vac. Sci. Technol. A 0734-2101 22, 1716 (2004). 10.1116/1.1705646
- (2004) J. Vac. Sci. Technol. A , vol.22 , pp. 1716
- Schaepkens, M.¹ Kim, T.W.² Erlat, A.G.³ Yan, M.⁴ Flanagan, K.W.⁵ Heller, C.M.⁶ McConnelee, P.A.⁷

6
- 0035336283
- Ultra barrier flexible substrates for flat panel displays
- DOI 10.1016/S0141-9382(00)00064-0, PII S0141938200000640
- P. E. Burrows, Displays 0141-9382 22, 65 (2001). 10.1016/S0141-9382(00) 00064-0 (Pubitemid 32457518)
- (2001) Displays , vol.22 , Issue.2 , pp. 65-69
- Burrows, P.E.¹ Graff, G.L.² Gross, M.E.³ Martin, P.M.⁴ Shi, M.K.⁵ Hall, M.⁶ Mast, E.⁷ Bonham, C.⁸ Bennett, W.⁹ Sullivan, M.B.¹⁰

7
- 31044444739
- Transparent hybrid inorganic/organic barrier coatings for plastic organic light-emitting diode substrates
- DOI 10.1116/1.1913680
- T. W. Kim, M. Yan, A. G. Erlat, P. A. McConnelee, M. Pellow, J. Deluca, T. P. Feist, A. R. Duggal, and M. Schaepkens, J. Vac. Sci. Technol. A 0734-2101 23, 971 (2005). 10.1116/1.1913680 (Pubitemid 43119235)
- (2005) Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films , vol.23 , Issue.4 , pp. 971-977
- Kim, T.W.¹ Yan, M.² Erlat, A.G.³ McConnelee, P.A.⁴ Pellow, M.⁵ Deluca, J.⁶ Feist, T.P.⁷ Duggal, A.R.⁸ Schaepkens, M.⁹

8
- 33748933847
- x hybrid-sandwich gate dielectrics for semitransparent pentacene thin-film transistors operating under 5 V
- DOI 10.1002/adma.200600409
- D. K. Hwang, C. S. Kim, J. M. Choi, K. Lee, J. H. Park, E. Kim, H. K. Baik, J. H. Kim, and S. Im, Adv. Mater. 0935-9648 18, 2299 (2006). 10.1002/adma.200600409 (Pubitemid 44433678)
- (2006) Advanced Materials , vol.18 , Issue.17 , pp. 2299-2303
- Hwang, D.K.¹ Kim, C.S.² Choi, J.M.³ Lee, K.⁴ Park, J.H.⁵ Kim, E.⁶ Baik, H.K.⁷ Kim, J.H.⁸ Im, S.⁹

9
- 0015313916
- 0003-6935, 10.1364/AO.11.000637
- P. K. Tien, G. Smolinsk, and R. J. Martin, Appl. Opt. 0003-6935 11, 637 (1972). 10.1364/AO.11.000637
- (1972) Appl. Opt. , vol.11 , pp. 637
- Tien, P.K.¹ Smolinsk, G.² Martin, R.J.³

10
- 0033874414
- Plasma-polymerized coatings using HMDSO precursor for iron protection
- DOI 10.1016/S0300-9440(99)00077-6
- C. Vautrin-Ul, C. Boisse-Laporte, N. Benissad, A. Chausse, P. Leprince, and R. Messina, Prog. Org. Coat. 0300-9440 38, 9 (2000). 10.1016/S0300-9440(99) 00077-6 (Pubitemid 30548928)
- (2000) Progress in Organic Coatings , vol.38 , Issue.1 , pp. 9-15
- Vautrin-Ul, C.¹ Boisse-Laporte, C.² Benissad, N.³ Chausse, A.⁴ Leprince, P.⁵ Messina, R.⁶

11
- 0001130401
- 1089-5647, 10.1021/jp990737e
- A. G. Erlat, R. J. Spontak, R. P. Clarke, T. C. Robinson, P. D. Haaland, Y. Tropsha, N. G. Harvey, and E. A. Vogler, J. Phys. Chem. B 1089-5647 103, 6047 (1999). 10.1021/jp990737e
- (1999) J. Phys. Chem. B , vol.103 , pp. 6047
- Erlat, A.G.¹ Spontak, R.J.² Clarke, R.P.³ Robinson, T.C.⁴ Haaland, P.D.⁵ Tropsha, Y.⁶ Harvey, N.G.⁷ Vogler, E.A.⁸

12
- 4344586790
- 0021-8979, 10.1063/1.1768610
- G. L. Graff, R. E. Williford, and P. E. Burrows, J. Appl. Phys. 0021-8979 96, 1840 (2004). 10.1063/1.1768610
- (2004) J. Appl. Phys. , vol.96 , pp. 1840
- Graff, G.L.¹ Williford, R.E.² Burrows, P.E.³

13
- 0032339055
- Transparent barrier coatings on polyethylene terephthalate by single-and dual-frequency plasma-enhanced chemical vapor deposition
- DOI 10.1116/1.581519
- A. S. da Silva Sobrinho, M. Latreche, G. Czeremuszkin, J. E. Klemberg-Sapieha, and M. R. Wertheimer, J. Vac. Sci. Technol. A 0734-2101 16, 3190 (1998). 10.1116/1.581519 (Pubitemid 128161018)
- (1998) Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films , vol.16 , Issue.6 , pp. 3190-3198
- Da Silva Sobrinho, A.¹ Latreche, S.M.² Czeremuszkin, G.³ Klemberg-Sapieha, J.E.⁴ Wertheimer, M.R.⁵

14
- 0031346359
- 1084-0184, 10.1023/A:1021886217900
- M. R. Alexander, F. R. Jones, and R. D. Short, Plasmas Polym. 1084-0184 2, 277 (1997). 10.1023/A:1021886217900
- (1997) Plasmas Polym. , vol.2 , pp. 277
- Alexander, M.R.¹ Jones, F.R.² Short, R.D.³

15
- 0001162612
- 1089-5647, 10.1021/jp970663b
- M. R. Alexander, F. R. Jones, and R. D. Short, J. Phys. Chem. B 1089-5647 101, 3614 (1997). 10.1021/jp970663b
- (1997) J. Phys. Chem. B , vol.101 , pp. 3614
- Alexander, M.R.¹ Jones, F.R.² Short, R.D.³

16
- 16744362582
- z films
- DOI 10.1016/j.surfcoat.2003.10.072, PII S0257897203012179
- Y. Barrell, M. Creatore, M. Schaepkens, C. D. Iacovangelo, T. Miebach, and M. C. M. van de Sanden, Surf. Coat. Technol. 0257-8972 180-181, 367 (2004). 10.1016/j.surfcoat.2003.10.072 (Pubitemid 38464079)
- (2004) Surface and Coatings Technology , vol.180-181 , pp. 367-371
- Barrell, Y.¹ Creatore, M.² Schaepkens, M.³ Iacovangelo, C.D.⁴ Miebach, T.⁵ Van De Sanden, M.C.M.⁶

17
- 0020814480
- 0022-233X, 10.1080/00222338308061795
- A. M. Wróbel, M. Kryszewski, and M. Gazicki, J. Macromol. Sci., Chem. 0022-233X 20, 583 (1983). 10.1080/00222338308061795
- (1983) J. Macromol. Sci., Chem. , vol.20 , pp. 583
- Wróbel, A.M.¹ Kryszewski, M.² Gazicki, M.³

18
- 0042199811
- 1084-0184, 10.1023/A:1019942625607
- M. Creatore, F. Palumbo, and R. d'Agostino, Plasmas Polym. 1084-0184 7, 291 (2002). 10.1023/A:1019942625607
- (2002) Plasmas Polym. , vol.7 , pp. 291
- Creatore, M.¹ Palumbo, F.² D'Agostino, R.³

19
- 77954888772
- 1612-8850, 10.1002/ppa200900159
- F. Fanelli, S. Lovascio, R. d'Agostino, F. Arefi-Khonsari, and F. Fracassi, Plasma Processes Polym. 1612-8850 7, 535 (2010). 10.1002/ppap. 200900159
- (2010) Plasma Processes Polym. , vol.7 , pp. 535
- Fanelli, F.¹ Lovascio, S.² D'Agostino, R.³ Arefi-Khonsari, F.⁴ Fracassi, F.⁵

20
- 33646116557
- 1612-8850, 10.1002/ppa200500140
- D. S. Wavhal, J. M. Zhang, M. L. Steen, and E. R. Fisher, Plasma Processes Polym. 1612-8850 3, 276 (2006). 10.1002/ppap.200500140
- (2006) Plasma Processes Polym. , vol.3 , pp. 276
- Wavhal, D.S.¹ Zhang, J.M.² Steen, M.L.³ Fisher, E.R.⁴

21
- 0035121163
- Oxygen diluted hexamethyldisiloxane plasmas investigated by means of in situ infrared absorption spectroscopy and mass spectrometry
- DOI 10.1088/0022-3727/34/1/315
- D. Magni, C. Deschenaux, C. Hollenstein, A. Creatore, and P. Fayet, J. Phys. D 0022-3727 34, 87 (2001). 10.1088/0022-3727/34/1/315 (Pubitemid 32136869)
- (2001) Journal of Physics D: Applied Physics , vol.34 , Issue.1 , pp. 87-94
- Magni, D.¹ Deschenaux, Ch.² Hollenstein, Ch.³ Creatore, A.⁴ Fayet, P.⁵

22
- 0033898284
- z films deposited in a helicon reactor
- DOI 10.1016/S0040-6090(99)00883-4
- K. Aumaille, C. Vallee, A. Granier, A. Goullet, F. Gaboriau, and G. Turban, Thin Solid Films 0040-6090 359, 188 (2000). 10.1016/S0040-6090(99)00883- 4 (Pubitemid 30530951)
- (2000) Thin Solid Films , vol.359 , Issue.2 , pp. 188-196
- Aumaille, K.¹ Vallee, C.² Granier, A.³ Goullet, A.⁴ Gaboriau, F.⁵ Turban, G.⁶

23
- 77954930661
- 1612-8850, 10.1002/ppa200900139
- A. M. Coclite, G. Ozaydin-Ince, F. Palumbo, A. Milella, and K. K. Gleason, Plasma Processes Polym. 1612-8850 7, 561 (2010). 10.1002/ppap.200900139
- (2010) Plasma Processes Polym. , vol.7 , pp. 561
- Coclite, A.M.¹ Ozaydin-Ince, G.² Palumbo, F.³ Milella, A.⁴ Gleason, K.K.⁵

24
- 33747449520
- A new encapsulation solution for flexible organic solar cells
- DOI 10.1016/j.tsf.2005.12.091, PII S0040609005023680
- G. Dennler, C. Lungenschmied, H. Neugebauer, N. S. Sariciftci, M. Latr̀che, G. Czeremuszkin, and M. R. Wertheimer, Thin Solid Films 0040-6090 511-512, 349 (2006). 10.1016/j.tsf.2005.12.091 (Pubitemid 44250840)
- (2006) Thin Solid Films , vol.511-512 , pp. 349-353
- Dennler, G.¹ Lungenschmied, C.² Neugebauer, H.³ Sariciftci, N.S.⁴ Latreche, M.⁵ Czeremuszkin, G.⁶ Wertheimer, M.R.⁷

25
- 17344384564
- 0042-207X, 10.1016/S0042-207X(00)00152-4
- M. Walker, K. M. Baumgartner, J. Feichtinger, M. Kaiser, A. Schulz, and E. Rauchle, Vacuum 0042-207X 57, 387 (2000). 10.1016/S0042-207X(00)00152-4
- (2000) Vacuum , vol.57 , pp. 387
- Walker, M.¹ Baumgartner, K.M.² Feichtinger, J.³ Kaiser, M.⁴ Schulz, A.⁵ Rauchle, E.⁶

26
- 24644523626
- Investigations of plasma polymerized barrier films on polymeric materials
- DOI 10.1016/j.surfcoat.2005.02.135, PII S0257897205003397
- M. Walker, F. Meermann, J. Schneider, K. Bazzoun, J. Feichtinger, A. Schulz, J. Kruger, and U. Schumacher, Surf. Coat. Technol. 0257-8972 200, 947 (2005). 10.1016/j.surfcoat.2005.02.135 (Pubitemid 41282328)
- (2005) Surface and Coatings Technology , vol.200 , Issue.1-4 SPEC. ISSUE , pp. 947-952
- Walker, M.¹ Meermann, F.² Schneider, J.³ Bazzoun, K.⁴ Feichtinger, J.⁵ Schulz, A.⁶ Kruger, J.⁷ Schumacher, U.⁸

27
- 0034817575
- Structure and properties of silicon oxide films deposited in a dual microwave-rf plasma reactor
- DOI 10.1016/S0040-6090(00)01870-8
- N. Benissad, K. Aumaille, A. Granier, and A. Goullet, Thin Solid Films 0040-6090 384, 230 (2001). 10.1016/S0040-6090(00)01870-8 (Pubitemid 32875147)
- (2001) Thin Solid Films , vol.384 , Issue.2 , pp. 230-235
- Benissad, N.¹ Aumaille, K.² Granier, A.³ Goullet, A.⁴

28
- 50849140170
- 0040-6090, 10.1016/j.tsf.2008.05.022
- M. Creatore, S. M. Rieter, Y. Barrell, M. C. M. Van De Sanden, R. Vernhes, and L. Martinu, Thin Solid Films 0040-6090 516, 8547 (2008). 10.1016/j.tsf.2008.05.022
- (2008) Thin Solid Films , vol.516 , pp. 8547
- Creatore, M.¹ Rieter, S.M.² Barrell, Y.³ Van De Sanden, M.C.M.⁴ Vernhes, R.⁵ Martinu, L.⁶

29
- 19944433947
- Optical and structural properties of siliconlike films prepared by plasma-enhanced chemical-vapor deposition
- DOI 10.1063/1.1830092, 023533
- A. Cremona, L. Laguardia, E. Vassallo, G. Ambrosone, U. Coscia, F. Orsini, and G. Poletti, J. Appl. Phys. 0021-8979 97, 023533 (2005). 10.1063/1.1830092 (Pubitemid 40183035)
- (2005) Journal of Applied Physics , vol.97 , Issue.2 , pp. 0235331-0235335
- Cremona, A.¹ Laguardia, L.² Vassallo, E.³ Ambrosone, G.⁴ Coscia, U.⁵ Orsini, F.⁶ Poletti, G.⁷

30
- 17444381208
- The role of oxygen dissociation in plasma enhanced chemical vapor deposition of zinc oxide from oxygen and diethyl zinc
- DOI 10.1007/s11090-004-8841-6
- C. A. Wolden, Plasma Chem. Plasma Process. 0272-4324 25, 169 (2005). 10.1007/s11090-004-8841-6 (Pubitemid 40536318)
- (2005) Plasma Chemistry and Plasma Processing , vol.25 , Issue.2 , pp. 169-192
- Wolden, C.A.¹

31
- 33847571146
- 0734-2101, 10.1116/1.573833
- P. G. Pai, S. S. Chao, Y. Takagi, and G. Lucovsky, J. Vac. Sci. Technol. A 0734-2101 4, 689 (1986). 10.1116/1.573833
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 689
- Pai, P.G.¹ Chao, S.S.² Takagi, Y.³ Lucovsky, G.⁴

32
- 0001339514
- 0022-3093, 10.1016/S0022-3093(00)00232-5
- C. Valĺe, A. Goullet, A. Granier, A. van der Lee, J. Durand, and C. Marlìre, J. Non-Cryst. Solids 0022-3093 272, 163 (2000). 10.1016/S0022-3093(00)00232-5
- (2000) J. Non-Cryst. Solids , vol.272 , pp. 163
- Valĺe, C.¹ Goullet, A.² Granier, A.³ Van Der Lee, A.⁴ Durand, J.⁵ Marlìre, C.⁶

33
- 4344675331
- 0040-6090, 10.1016/j.tsf.2004.05.048
- T. K. S. Wong, B. Liu, B. Narayanan, V. Ligatchev, and R. Kumar, Thin Solid Films 0040-6090 462-463, 156 (2004). 10.1016/j.tsf.2004.05.048
- (2004) Thin Solid Films , vol.462-463 , pp. 156
- Wong, T.K.S.¹ Liu, B.² Narayanan, B.³ Ligatchev, V.⁴ Kumar, R.⁵

34
- 0032476351
- 0040-6090, 10.1016/S0040-6090(98)00989-4
- U. Beck, D. T. Smith, G. Reiners, and S. J. Dapkunas, Thin Solid Films 0040-6090 332, 164 (1998). 10.1016/S0040-6090(98)00989-4
- (1998) Thin Solid Films , vol.332 , pp. 164
- Beck, U.¹ Smith, D.T.² Reiners, G.³ Dapkunas, S.J.⁴

35
- 13544259053
- 2 glasses with excessive and deficient oxygen
- DOI 10.1016/0921-4526(95)00718-0
- H. Kobayashi, T. Kosugi, and Y. Kogure, Physica B 0921-4526 219-220, 276 (1996). 10.1016/0921-4526(95)00718-0 (Pubitemid 126386899)
- (1996) Physica B: Condensed Matter , vol.219-220 , Issue.1-4 , pp. 276-278
- Kobayashi, H.¹ Kosugi, T.² Kogure, Y.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.