Mechanical properties of SiO2 and Si3N4 coatings: A BAM/NIST co-operative project

Thin Solid Films

Volumn 332, Issue 1-2, 1998, Pages 164-171

  Beck, U ^a   Smith, D T ^b   Reiners, G ^a   Dapkunas, S J ^b  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Coatings; Hardness; Indentation; Modulus; Silica; Silicon nitride; Thin films

Indexed keywords

ELASTIC MODULI; HARDNESS TESTING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RESIDUAL STRESSES; SILICA; SILICON NITRIDE; THIN FILMS;

INDENTATION;

CERAMIC COATINGS;

EID: 0032476351     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00989-4     Document Type: Article

References (6)

1. Chr. Ullner, G.D. Quinn, VAMAS TWA 3 Round Robin Report, 1997, in press.
2. U. Beck, G. Reiners, Th. Wirth, V. Hoffmann, F. Präßler, Thin Solid Films 290-291 (1996) 57.
3. W.C. Oliver, G.M. Pharr, J. Mater. Res. 7 [6] (1992) 1564.
4. D. Schneider, Th. Schwarz, B. Schultrich, Thin Solid Films 219 (1992) 92.
5. T. Page, S. Hainsworth, in: D.T. Smith (Ed.), NIST Special Publication 896, Conference Proceedings: International Workshop on Instrumented Indentation, 1996, p. 21.
6. S.R.J. Saunders, D.T. Smith, T. Yoshida, VAMAS Bulletin No. 21, Dec. 1997, pp. 11-19..