Investigations of plasma polymerized barrier films on polymeric materials

Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 947-952

  Walker, M ^a   Meermann, F ^a   Schneider, J ^a   Bazzoun, K ^a   Feichtinger, J ^a   Schulz, A ^a   Kruger J ^a   Schumacher, U ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Barrier films; Microwave plasma; Permeation; Pulsed plasma; SiOx

Indexed keywords

COATING TECHNIQUES; DEPOSITION; ELECTRON CYCLOTRON RESONANCE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; OXYGEN; PLASMA POLYMERIZATION; PLASMA SOURCES; POLYETHYLENE TEREPHTHALATES; SILICON COMPOUNDS;

BARRIER FILMS; MICROWAVE PLASMA; PERMEATION RATE; PULSED PLASMA;

THIN FILMS;

PLASMA TREATMENT;

EID: 24644523626     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.02.135     Document Type: Article

References (11)

1. J. Comyn Polymer Permeability 1988 Elsevier Applied Science Kidlington, UK
2. T. Krug Pap.-Kunstst.-Verarb. Int. 11 1992 40
3. G. Czeremuszkin M. Latreche M.R. Wertheimer A.S. Sobrinho da Silva Plasmas Polym. 6 2001 107
4. N. Inagaki S. Tasaka T. Nakajima J. Appl. Polym. Sci. 78 2000 2389
5. M. Creatore F. Palumbo R. d'Agostino P. Fayet Surf. Coat. Technol. 142-144 2001 163
6. L. Agres Y. Segui R. Delsol P. Raynaud J. Appl. Polym. Sci. 61 1996 2015
7. U. Moosheimer Ch. Bichler Surf. Coat. Technol. 116-119 1999 812
8. M. Walker Recent Res. Devel. Appl. Pol. Sci. 1 2002 281
9. J.T. Felts A.D. Grubb J. Vac. Sci. Technol., A 10 4 1992 1675
10. M. Walker K.M. Baumgärtmer J. Feichtinger M. Kaiser A. Schulz E. Räuchle Vacuum 2000 387
11. P.G. Pai S.S. Chao Y. Takagi G. Lucovsky J. Vac. Sci. Technol., A 4 1986 689