SiOx Gas Barrier Coatings on Polymer Substrates: Morphology and Gas Transport Considerations

Journal of Physical Chemistry B

Volumn 103, Issue 29, 1999, Pages 6047-6055

  Erlat, A G ^a,c   Spontak, R J ^a   Clarke, R P ^b   Robinson, T C ^b   Haaland, P D ^b   Tropsha, Y ^b   Harvey, N G ^b   Vogler, E A ^b,d  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b Becton Dickinson Technologies   (United States)

^c UNIVERSITY OF OXFORD   (United Kingdom)

^d PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001130401     PISSN: 15206106     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp990737e     Document Type: Article

References (49)

1. Krug, T.; Ludwig, R.; Steiniger, G. SVC 36th Annu. Technol. Conf. Proc. 1993, 302.
2. Chahroudi, D. SVC 31st Annu. Technol. Conf. Proc. 1988, 145; SVC 32nd Annu. Technol. Conf. Proc. 1989, 29; SVC 34th Annu. Technol. Conf. Proc. 1991, 130.
3. Chahroudi, D. SVC 31st Annu. Technol. Conf. Proc. 1988, 145; SVC 32nd Annu. Technol. Conf. Proc. 1989, 29; SVC 34th Annu. Technol. Conf. Proc. 1991, 130.
4. Chahroudi, D. SVC 31st Annu. Technol. Conf. Proc. 1988, 145; SVC 32nd Annu. Technol. Conf. Proc. 1989, 29; SVC 34th Annu. Technol. Conf. Proc. 1991, 130.
5. Krug, T. G. SVC 33rd Annu. Technol. Conf. Proc. 1990, 163.
6. Jamieson, E. H. H.; Windle, A. H. J. Mater. Sci. 1983, 18, 64.
7. Misiano, C.; Simonetti, E.; Stafetti, F.; Taglioni, G. Proc. 6th Internatl. Conf. Vac. Web Coat. 1992, Bakish Materials Corp., Englewood, NJ, 70. Misiano, C.; Simonetti, E.; Cerolini, P.; Stafetti, F.; Taglioni, G.; Pasqui, A.; Fusi, F. SVC 36th Annu. Technol. Conf. Proc. 1993, 307.
8. Misiano, C.; Simonetti, E.; Stafetti, F.; Taglioni, G. Proc. 6th Internatl. Conf. Vac. Web Coat. 1992, Bakish Materials Corp., Englewood, NJ, 70. Misiano, C.; Simonetti, E.; Cerolini, P.; Stafetti, F.; Taglioni, G.; Pasqui, A.; Fusi, F. SVC 36th Annu. Technol. Conf. Proc. 1993, 307.
9. Philips, R. W.; Markantes, T.; LeGallee, C. SVC 36th Annu. Technol. Conf. Proc. 1993, 293.
10. Bodino, F.; Baud, G.; Benmalek, M.; Besse, J. P.; Dunlop, H. M.; Jacquet, M. Thin Solid Films 1994, 241, 21.
11. Felts, J. T.; Grubb, A. D. J. Vac. Sci. Technol. A 1992, 10, 1675.
12. Langowski, H. C. SVC 39th Annu. Technol. Conf. Proc. 1996, 398.
13. Mercea, P. V.; Bartan, M. J. Membr. Sci. 1991, 59, 353.
14. Felts, J. T. SVC 33rd Annu. Technol. Conf. Proc. 1990, 184.
15. Nelson, R. J. SVC 35th Annu. Technol. Conf. Proc. 1992, 75.
16. Knoll, R. W.; Theil, J. A. SVC 38th Annu. Technol. Conf. Proc. 1995, 425.
17. Jansen, F. American Vacuum Society Short Course Program, 43rd National Symposium, American Vacuum Society, Philadelphia, 1996.
18. Vossen, J.; Kern, W., Eds., Thin Film Processes II, Academic: Boston, 1991; pp 443-496.
19. Garcia-Ayuso, G.; Vazquez, L.; Martinez-Duart, J. M. Surf. Coat. Technol. 1996, 80, 203.
20. Barker, C. P.; Kochem, K. H.; Revell, K. M.; Kelly, R. S. A.; Badyal, J. P. S. Thin Solid Films 1995, 46, 259.
21. Mallik, R. R.; Henriksen, P. N.; Butler, T.; Kulnis, W. J.; Confer, T. J. J. Vac. Sci. Technol. A 1992, 10, 2412.
22. Wang, B.-C.; Erlat, A. G.; Spontak, R. J.; Tropsha, Y. G.; Vogler, E. A.; Dalvie, M.; Mar, K. ACS Polym. Prepr. 1997, 38, 1018. Wang, B.- C.; Tropsha, Y.; Montgomery, D. B.; Vogler, E. A.; Spontak, R. J. J. Mater. Sci. Lett. 1999, 18, 311.
23. Wang, B.-C.; Erlat, A. G.; Spontak, R. J.; Tropsha, Y. G.; Vogler, E. A.; Dalvie, M.; Mar, K. ACS Polym. Prepr. 1997, 38, 1018. Wang, B.-C.; Tropsha, Y.; Montgomery, D. B.; Vogler, E. A.; Spontak, R. J. J. Mater. Sci. Lett. 1999, 18, 311.
24. Benmalek, M.; Dunlop, H. M. Surf. Coat. Technol. 1995, 76, 821.
25. Thyen, R.; Weber, A.; Klages, C. P. Surf. Coat. Technol. 1997, 97, 26.
26. Philips, R. W.; Markantes, T.; LeGallee, C. SVC 36th Annu. Technol. Conf. Proc. 1993, 293.
27. Roberts, A. P.; Henry, B. M.; Sutton, A. P.; Grovenor, C. R. M.; Briggs, G. A. D. (submitted for publication).
28. Henry, B. M.; Roberts, A. P.; Grovenor, C. R. M.; Sutton, A. P.; Briggs, G. A. D.; Tsukahara, Y.; Miyamoto, Y. M.; Chater, R. J. SVC 41st Annu. Technol. Conf. Proc. 1998, 434.
29. Tropsha, Y. G.; Harvey, N. G. J. Phys. Chem. B 1997, 101, 2239.
30. Haaland, P. D.; Clarke, R.; O'Connell, M.; Baik, J.; Hardy, S.; Nychka, D. Non-Parametric Response Surface Methods, 1997, presented at Workshop on Topics in Model Fitting and Mixture Experiments, Irsee, Germany.
31. Yasuda, H. Plasma Polymerization, Academic: New York, 1985; pp 277-333.
32. Martin, Y.; Williams, C. C.; Wichramasinghe, G. H. Appl. Phys. 1987, 61, 4723.
33. Reimer, L., Ed., Energy-Filtering Transmission Electron Microscopy; Springer-Verlag: New York, 1995.
34. Williams, J. L.; Burkett, S. L.; McGuire, S. U.S. Patent 5,364,666, 15 November 1994.
35. Green, P. J.; Silverman, B. W. Nonparametric Regression and Generalized Linear Models, Chapman and Hall: London, 1994.
36. Lee, J. H.; Kim, D. S.; Lee, Y. H. J. Electrochem. Soc. 1996, 143, 1442.
37. Theil, J. A.; Brace, J. G.; Knoll, R. W. J. Vac. Sci. Technol. A 1994, 12, 1365.
38. Doremus, R. H. Glass Science, John Wiley & Sons: London, 1973.
39. Michalske, T. A.; Bunker, B. C. Sci. Am. 1987, 257, 122.
40. Robinson, G. W.; Zhu, S.-B.; Singh, S.; Evans, M. W. Water in Biology, Chemistry and Physics; World Scientific: Singapore, 1996.
41. Perkins, W. G.; Begeal, D. R. J. Chem. Phys. 1971, 54, 1683.
42. Norton, F. J. J. Am. Ceram. Soc. 1953, 36, 90.
43. Stannet, V. In Diffusion in Polymers; Crank, J. Ed.; Academic: New York, 1968, pp 41-73.
44. Erlat, A. G.;, Wang, B.-C.; Spontak, R. J.; Tropsha, Y.; Mar, K. D.; Montgomery, D. B.; Vogler, E. A. submitted for publication in J. Mater. Res.
45. Moulson, J.; Roberts, T. P. Trans. Faraday Soc. 1961, 57, 1208.
46. McDonald, R. S. J. Phys. Chem. 1958, 62, 1168.
47. Little, L. H. Infrared Spectra of Adsorbed Species, Academic: London, 1966.
48. Eisenberg, D.; Kauzmann, W. The Structure and Properties of Water, Clarendon: Oxford, 1969; p 179.
49. Singh, A.; Koros, W. J. Ind. Eng. Chem. Res. 1996, 35, 1231.