Characterization of doped diamond-like carbon films deposited by hot wire plasma sputtering of graphite

Applied Physics A: Materials Science and Processing

Volumn 79, Issue 8, 2004, Pages 2079-2084

  Vasilets, V N ^a   Hirose, A ^b   Yang, Q ^b   Singh, A ^b   Sammynaiken, R ^b   Foursa, M ^b   Shulga, Y M ^c  

^a SEMENOV INSTITUTE OF CHEMICAL PHYSICS   (Russian Federation)

^b UNIVERSITY OF SASKATCHEWAN   (Canada)

^c INSTITUTE OF PROBLEMS OF CHEMICAL PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; DIAMONDS; DOPING (ADDITIVES); ELECTRON BEAMS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GRAPHITE; RAMAN SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON FILMS; CCD CAMERA; PLASMA SPUTTERING;

THIN FILMS;

EID: 6344256410     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-004-2873-x     Document Type: Article

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