SCOPUS 정보 검색 플랫폼

Surface and Interface Analysis

Volumn 34, Issue 1, 2002, Pages 672-676

Investigation of thin films of mixed oxides for gas-sensing applications

(8) Kaciulis, S a Pandolfi, L a Viticoli, S a Sberveglieri, G b Zampiceni, E b Wlodarski, W c Galatsis, K c Li, Y X c

a CNR (Italy)

b UNIVERSITY OF BRESCIA (Italy)

c RMIT UNIVERSITY (Australia)

Author keywords

Depth profiling; Gas sensor; Magnetron sputtering; Metal oxide; Sol gel; XPS

Indexed keywords

ANNEALING; CHARACTERIZATION; COMPOSITION; DEPOSITION; MAGNETRON SPUTTERING; MOLYBDENUM COMPOUNDS; OXIDES; PARAMAGNETIC RESONANCE; SOL-GELS; X RAY PHOTOELECTRON SPECTROSCOPY;

CYCLIC ARGON SPUTTERING; DEPTH PROFILING; ELECTRICAL RESPONSE; GAS SENSING;

THIN FILMS;

EID: 0036694127 PISSN: 01422421 EISSN: None Source Type: Journal
DOI: 10.1002/sia.1385 Document Type: Conference Paper

Times cited : (39)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.