Optimization of geometric characteristics to improve sensing performance of MEMS piezoresistive strain sensors

Journal of Micromechanics and Microengineering

Volumn 20, Issue 1, 2010, Pages

  Mohammed, Ahmed A S ^a   Moussa, Walied A ^a   Lou, Edmond ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; SILICON; STRESS CONCENTRATION; STRUCTURAL DESIGN;

CONCENTRATION REGION; FABRICATED SENSORS; GEOMETRIC CHARACTERISTICS; MICROFABRICATION PROCESS; OPERATING TEMPERATURE RANGES; SENSING PERFORMANCE; SENSOR SENSITIVITY; SILICON-BASED SENSORS;

FINITE ELEMENT METHOD;

EID: 79952088186     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/1/015015     Document Type: Article

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