High sensitivity piezoresistive cantilever sensor for biomolecular detection

Journal of Physics: Conference Series

Volumn 34, Issue 1, 2006, Pages 429-435

  He, Johnny H ^a   Li, Yong Feng ^a  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33744749849     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/34/1/070     Document Type: Article

References (10)

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10. Mo Yang, X Z, Kambiz Vafai and Cengiz S Ozkan 2003 High sensitivity piezoresistive cantilever design and optimization for analyte-receptor binding J. Micromechanics Microengineering 13 842-872