Impact of self heating in a silicon MEMS piezoresistive pressure sensor

Sensor Letters

Volumn 2, Issue 2, 2004, Pages 131-137

  Pramanik, C ^a   Islam, T ^a   Saha, H ^a  

^a JADAVPUR UNIVERSITY   (India)

Author keywords

MEMS pressure sensor; Piezoresistive coefficient; Self heating; Thermal balance

Indexed keywords

BOUNDARY CONDITIONS; COMPUTER SIMULATION; HEAT CONDUCTION; HEAT CONVECTION; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION;

MEMS PRESSURE SENSORS; PIEZORESISTIVE COEFFICIENT; RADIATION LOSSES; SELF HEATING; THERMAL BALANCE;

SILICON SENSORS;

EID: 8344259142     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2004.040     Document Type: Article

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