High sensitivity MEMS strain sensor: Design and simulation

Sensors

Volumn 8, Issue 4, 2008, Pages 2642-2661

  Mohammed, Ahmed A S ^a   Moussa, Walied A ^a   Lou, Edmond ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Finite Element Modeling; MEMS; Microfabrication; Piezoresistive; Simulation; Strain sensor

Indexed keywords

ENVIRONMENTAL CONDITIONS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICROFABRICATION PROCESS; PERFORMANCE CHARACTERISTICS; PIEZO-RESISTIVE; PIEZORESISTIVE PROPERTIES; SIMULATION; STRAIN SENSORS;

FINITE ELEMENT METHOD; MEMS; MICROANALYSIS; MICROFABRICATION; SILICON WAFERS;

SENSORS;

EID: 43049090137     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s8042642     Document Type: Article

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