The preparation and evaluation of graded multilayer ta-C films deposited by FCVA method

Applied Surface Science

Volumn 257, Issue 11, 2011, Pages 5064-5069

  Wang, Gui Gen ^a   Zhang, Hua Yu ^a   Li, Wen Yan ^a   Yang, Fang Xu ^a   Cui, Lin ^a   Zuo, Hong Bo ^a   Han, Jie Cai ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Filtered cathode vacuum arc; Graded multilayer ta C films; Hardness; Internal stress; Layer structure

Indexed keywords

BIAS VOLTAGE; CATHODES; HARDNESS; MULTILAYER FILMS; MULTILAYERS; RESIDUAL STRESSES; VACUUM APPLICATIONS; VACUUM TECHNOLOGY;

DIFFERENT SUBSTRATES; FILM-DEPOSITION PROCESS; FILTERED CATHODE VACUUM ARCS; LAYER STRUCTURES; MICROSTRUCTURE CHARACTERISTICS; NEGATIVE SUBSTRATES; SUBSTRATE BIAS VOLTAGES; TA-C FILM;

FILM PREPARATION;

EID: 79951670266     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.01.022     Document Type: Article

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