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Thin Solid Films

Volumn 516, Issue 16, 2008, Pages 5364-5367

Mechanical properties of gradient pulse biased amorphous carbon film

(6) Teo, Edwin H T a Chua, Daniel H C b Lee, M L a Ee, C L a Lee, C K a Tay, B K a

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

b NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

Author keywords

Amorphous carbon; Hardness; Stress

Indexed keywords

AMORPHOUS FILMS; FILM PREPARATION; FRICTION; HARDNESS; STRESS ANALYSIS; TRIBOLOGY;

FRICTIONAL COEFFICIENT; GRADIENT PULSE BIASED AMORPHOUS FILMS;

AMORPHOUS CARBON;

EID: 43949138904 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2007.07.046 Document Type: Article

Times cited : (5)

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