Growth of tetrahedral amorphous carbon film: Tight-binding molecular dynamics study

Carbon

Volumn 43, Issue 9, 2005, Pages 1976-1983

  Zheng, B ^a   Zheng, W T ^a   Yu, S S ^a   Tian, H W ^a   Meng, F L ^a   Wang, Y M ^a   Zhu, J Q ^b   Meng, S H ^b   He, X D ^b   Han, J C ^b  

^a JILIN UNIVERSITY   (China)

^b HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Density; Diamond like carbon; Molecular simulation

Indexed keywords

ALGORITHMS; AMORPHOUS MATERIALS; ANNEALING; BOUNDARY CONDITIONS; COMPRESSIVE STRESS; COMPUTER SIMULATION; DENSITY (SPECIFIC GRAVITY); DEPOSITION; DIAMOND LIKE CARBON FILMS; EQUATIONS OF MOTION; ION IMPLANTATION; MOLECULAR DYNAMICS;

DENSITY; DIAMOND-LIKE CARBON; ION ENERGY; MOLECULAR SIMULATION;

GROWTH KINETICS;

EID: 21144431751     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2005.03.008     Document Type: Article

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