MEMS motion sensors based on the variations of the fringe capacitances

IEEE Sensors Journal

Volumn 11, Issue 4, 2011, Pages 1069-1077

  Langfelder, Giacomo ^a   Longoni, Antonio Francesco ^a   Tocchio, Alessandro ^a   Lasalandra, Ernesto ^b  

^a POLITECNICO DI MILANO   (Italy)

^b STMICROELECTRONICS   (Italy)

Author keywords

Fringe fields; MEMS accelerometers; motion sensors

Indexed keywords

A-PLANE; AIR VOLUMES; CAPACITANCE VALUES; CAPACITANCE VARIATION; CAPACITIVE SENSOR; EARTH ACCELERATION; ELECTRICAL PATH; EXTERNAL FORCE; FEM SIMULATIONS; FRINGE CAPACITANCE; FRINGE FIELDS; FRINGE-FIELD CAPACITANCE; MEMS ACCELEROMETERS; MOTION SENSORS; PARALLEL PLATES; PER UNIT; PULL-IN INSTABILITY; SEISMIC MASS; SENSING ELEMENTS; SENSITIVITY IMPROVEMENTS; SURFACE MICROMACHINING PROCESS; TEST DEVICE; THIN STRIPS;

ACCELEROMETERS; ELECTRIC GROUNDING; FINITE ELEMENT METHOD; MICROMACHINING; SENSITIVITY ANALYSIS; SENSORS;

CAPACITANCE;

EID: 79951654704     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2010.2078499     Document Type: Article

References (19)

1. K. Lazarov and E. Enikov, "Micro-mechatronics and mems: Capacitive position detection," in CISM International Centre for Mechanical Sciences, F. DeBona and E. T. Emikov, Eds. New York: Springer.
2. K. Biswas, S. Sen, and P. K. Dutta, "Mems capacitive accelerometer," Sens. Lett., vol. 5, pp. 471-484, 2007.
3. K. Y. Park, C. W. Lee, H. S. Jang, Y. Oh, and B. Ha, "Capacitive type surface-micromachined silicon accelerometer with stiffness tuning capability," Sens. Actuators A, vol. 73, pp. 109-116, 1999.
4. M. Handtmann, R. Aigner, A. Meckes, and G. K. M. Wachutka, "Sensitivity enhancement of mems inertial sensors using negative springs and acti (Pubitemid 34758721)
5. G. N. Nielson and G. Barbastathis, "Dynamic pull-in of parallel-plate and torsional electrostatic mems actuator," J. Microelectromech. Syst., vol. 15, no. 4, pp. 811-821, 2006. (Pubitemid 44251388)
6. L. Rocha, E. Cretu, and R.Wolffenbuttel, "Using dynamic voltage drive in a parallel-plate electrostatic actuator for full-gap travel range and positioning," J. Microelectromech. Syst., vol. 15, pp. 69-83, 2006. (Pubitemid 43210792)
7. P. Robert, V. Nguyen, S. Hentz, L. Duraffourg, G. Jourdan, J. Arcamone, and S. Harrisson, "M&nems:A newapproach for ultra-low cost 3D inertial sensor," in Proc. IEEE Sensors Conf., 2009, pp. 963-966.
8. C. Comi, A. Corigliano, G. Langfelder, A. Longoni, A. Tocchio, and B. Simoni, "A high sensitivity uniaxial resonant accelerometer," in Proc. IEEE MEMS Conf., 2010, pp. 260-263.
9. J. I. Seeger and B. E. Boser, "Charge control of parallel-plate, electrostatic actuators and the tip-in instability," J. Microelectromech. Syst., vol. 12, no. 5, pp. 656-671, 2003.
10. G. Langfelder, T. Frizzi, A. Tocchio, E. Lasalandra, and A. Longoni, "Modelling and testing of a MEMS accelerometer controlled and read-out beyond the pull-in instability limit," in Proc. Eurosensors XXIV, Linz, Austria, Sep. 5-8, 2010, in press.
11. S. Aoyagi and Y. C. Tai, "Development of surface micromachinable capacitive accelerometers using fringe electrical field," in Proc. Transducers, 2003, pp. 1383-1386.
12. S. Aoyagi and Y. Isono, "High-sensitivity surface micromachinable accelerometer using a ferroelectric substrate and its characterization," Trans. Elect. Electron. Eng., vol. 2, pp. 319-327, 2007. (Pubitemid 46715019)
13. A. E. Ruehli and P. A. Brennan, "Capacitance models for integrated circuit metallization wires," IEEE J. Solid-State Circuits, vol. 10, no. 6, pp. 530-536, Dec. 1975.
14. STMicroelectronics, LIS244AL MEMS Motion Sensor Tech. Note pp. 1-15, 2007.
15. Analog Devices, ADXL202/210 Low Cost Dual Axis MEMS Accelerometers Tech. Note, pp. 1-11, 1999.
16. A. Corigliano, B. D. Masi, A. Frangi, C. Comi, A.Villa, and M. Marchi, "Mechanical characterization of polysilicon through on chip tensile tests," J. Microelectromech. Syst., vol. 13, pp. 200-219, 2004.
17. G. Langfelder, A. Longoni, and F. Zaraga, "Low-noise real-time measurement of the position of movable structures in mems," Sens. Actuators A, vol. 148, pp. 401-406, 2008.
18. M. Liu, G. Zhang, J. Dong, and C. Zhao, "Interface circuit for capacitive microaccelerometer," in Proc. IEEE Sensors Conf., 2008, pp. 654-657.
19. B. V. Amini and F. Ayazi, "Micro-gravity capacitive silicon-on-insulator accelerometers," J. Micromech. Microeng., vol. 15, pp. 2113-2120, 2005. (Pubitemid 41504039)