Modelling and testing of a MEMS accelerometer controlled and read-out beyond the pull-in instability limit

Procedia Engineering

Volumn 5, Issue , 2010, Pages 1067-1070

  Langfelder, Giacomo ^a   Frizzi, Tommaso ^a   Tocchio, Alessandro ^a   Lasalandra, Ernesto ^b   Longoni, Antonio ^a  

^a POLITECNICO DI MILANO   (Italy)

^b STMICROELECTRONICS   (Italy)

Author keywords

Inertial sensors; MEMS; Pull in; VLSI electronics

Indexed keywords

ACCELEROMETERS; CAPACITANCE; COMPUTER HARDWARE DESCRIPTION LANGUAGES; ELECTROSTATICS; MEMS; MICROELECTRONICS; VLSI CIRCUITS;

CMOS SWITCHED CAPACITORS; ELECTROSTATIC ATTRACTIONS; GEOMETRICAL DIMENSIONS; INERTIAL SENSOR; PARASITIC CAPACITANCE; PULL-IN; SIMULATION PREDICTION; VLSI ELECTRONICS;

CIRCUIT SIMULATION;

EID: 78650604186     PISSN: None     EISSN: 18777058     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2010.09.294     Document Type: Conference Paper

References (6)

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