Interface circuit for capacitive microaccelerometer

Midwest Symposium on Circuits and Systems

Volumn , Issue , 2008, Pages 654-657

  Liu, Minjie ^a   Zhang, Gang ^a   Dong, Jingxin ^a   Zhao, Changde ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; LOGIC CIRCUITS; SENSOR NETWORKS; SIGNAL PROCESSING;

AMBIENT ATMOSPHERES; CAPACITIVE; CAPACITIVE ACCELEROMETERS; CAPACITIVE MICRO-ACCELEROMETER; CMOS PROCESSES; INTERFACE CIRCUITS; MEASUREMENT RESULTS; MEMS SENSORS; NOISE FLOORS; SAMPLING RATES; SIGNAL PROCESSING CIRCUITS;

NETWORKS (CIRCUITS);

EID: 54249122849     PISSN: 15483746     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSCAS.2008.4616884     Document Type: Conference Paper

References (9)

1. N. Yazdi, F.Ayazi, and K.Najafi, "Micromachined Inertial Sensors, " Pro. IEEE, vol. 86, pp. 1640-1659, Aug. 1998.
2. C.Lu, M.Lemkin, and B.Boser, "A monolithic surface micromachined accelerometer with digital output, " IEEE J. Solid-State Circuits, vol. 30, pp. 1367-1373, Dec. 1995.
3. Ji, X.S, Wang, S.R, Analysis of characteristics on capacitive silicon micro-accelerometer system, Journal of Astronautics, 26 (4), 446-449, 2005.
4. C.P.Lewis, M.Kraft, T.G.Hesketch, Mathematical model for a micromachined accelerometer, Transactions of the Institute of Mea. and Con. 18 (2), 92-98, 1996.
5. N. Yazdi, H. Kulah, and K. Najafi, "Precision readout circuits for capacitive microaccelerometers, " Sensors, Pro. IEEE, vol. 1, pp. 28-31, Oct. 2004.
6. N. Wongkomet, B. E. Boser, "Correlated double sampling in capacitive position sensing circuits for micromachined applications, " IEEE Asia-Pacific Conf. on circuits and Systems, pp. 723-726, Nov. 1998.
7. M. Lemkin, B. Boser, "A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics, " IEEE J. of Solid-State Circuit, vol. 34, pp. 456-468, April. 1999.
8. P. E. Allen, D. R. Holberg, CMOS Analog Circuit Design, Publishing House of Electronics Industry, 2002.
9. H. Kulah, J. Chae, N. Yazdi, and K. Najafi, "Noise analysis and characterization of a sigma-delta capacitive microaccelerometer, " IEEE J. of Solid-State Circuit, vol. 41, pp. 352-361, Feb. 2006.