M&NEMS: A new approach for ultra-low cost 3D inertial sensor

Proceedings of IEEE Sensors

Volumn , Issue , 2009, Pages 963-966

  Robert, Ph ^a   Nguyen, V ^a   Hentz, S ^a   Duraffourg, L ^a   Jourdan, G ^a   Arcamone, J ^a   Harrisson, S ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CONSUMER MARKET; DIFFERENTIAL DETECTION; IN-PLANE; INERTIAL FORCES; INERTIAL SENSOR; LOW COSTS; MEMS ACCELEROMETER; NEW APPROACHES; OUT-OF-PLANE; STRESS GAUGES; THERMAL SENSITIVITY;

INERTIAL NAVIGATION SYSTEMS; SMART SENSORS; THREE DIMENSIONAL;

ACCELEROMETERS;

EID: 77951175613     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2009.5398195     Document Type: Conference Paper

References (4)

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3. Jonah A. Harley and Thomas W. Kenny, Journal of microelectromechanical systems VOL. 9, NO.2, JUNE 2000
4. John H. Scofield, Rev. Sci. Instrum., Vol.58, No.6, June 1987