Sensitivity enhancement of MEMS inertial sensors using negative springs and active control

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 153-160

  Handtmann, Martin ^a,b   Aigner, Robert ^a   Meckes, Andreas ^a   Wachutka, Gerhard K M ^b  

^a INFINEON TECHNOLOGIES AG   (Germany)

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

architecture; Force feedback loop; Negative spring

Indexed keywords

BANDWIDTH; COMPUTER SIMULATION; ELECTROSTATICS; FEEDBACK CONTROL; SENSORS; SIGNAL TO NOISE RATIO; TRANSDUCERS;

ACTIVE CONTROL; NEGATIVE SPRINGS; SIGNAL-TO-ELECTRIC NOISE RATIO;

MICROELECTROMECHANICAL DEVICES;

EID: 0036544051     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00818-4     Document Type: Conference Paper

References (8)

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5. An analysis of non-linear behavior in delta-sigma modulators
6. Surface-micromachined accelerometers
7. Cavity-micromachining technology: Zero-package solution for inertial sensors