High-sensitivity surface micromachinable accelerometer using a ferroelectric substrate and its characterization

IEEJ Transactions on Electrical and Electronic Engineering

Volumn 2, Issue 3, 2007, Pages 319-327

  Aoyagi, Seiji ^a   Isono, Yuichi ^a  

^a KANSAI UNIVERSITY   (Japan)

Author keywords

Accelerometer; Characterization; FEM simulation; Ferroelectric substrate; Parylene; PZT; Sensitivity

Indexed keywords

CAPACITANCE; CHARACTERIZATION; FERROELECTRIC MATERIALS; FINITE ELEMENT METHOD; LEAD COMPOUNDS; MATHEMATICAL MODELS; SENSITIVITY ANALYSIS; SUBSTRATES;

FEM SIMULATION; FERROELECTRIC SUBSTRATE; PARYLENE;

ACCELEROMETERS;

EID: 34248213132     PISSN: 19314973     EISSN: 19314981     Source Type: Journal    
DOI: 10.1002/tee.20146     Document Type: Article

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