Fabrication and characterization of a novel magnetoelectric multiferroic MEMS cantilevers on Si

Sensors and Actuators, A: Physical

Volumn 166, Issue 1, 2011, Pages 83-87

  Prashanthi, K ^a   Mandal, M ^a   Duttagupta, S P ^a   Pinto, R ^a   Palkar, V R ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

Microcantilevers; Multiferroics; Piezoelectric properties

Indexed keywords

ADDITIONAL FLEXIBILITIES; APPLIED VOLTAGES; LEAD ZIRCONATE TITANATE; MEMSDEVICES; MICRO-CANTILEVERS; MULTIFERROICS; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC PROPERTY;

COMPOSITE MICROMECHANICS; ELECTRIC FIELDS; FABRICATION; MAGNETIC FIELDS; NANOCANTILEVERS; SEMICONDUCTING LEAD COMPOUNDS;

PIEZOELECTRICITY;

EID: 79951601208     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.12.013     Document Type: Article

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