Remanent piezoelectric constant of PZT thin films

Ferroelectrics

Volumn 224, Issue 1-4, 1999, Pages 307-314

  Cattan, Eric ^a   Manceau, Jean Francois ^b   Haccart, Thibault ^a   Biwersi, Stephane ^b   Velu, Gabriel ^a   Remiens, Denis ^a   Bastien, Francois ^b  

^a Lab des Matriaux Avances Ceramiques   (France)

^b Lab Phys Metrologie Oscillateurs   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; FABRICATION; MAGNETRON SPUTTERING; MICROELECTROMECHANICAL DEVICES; PERMITTIVITY; PIEZOELECTRICITY; SPUTTER DEPOSITION; THIN FILMS;

FILM THICKNESS; PIEZOELECTRIC CONSTANT; ULTRASONIC MICROMOTORS;

LEAD COMPOUNDS;

EID: 0033086711     PISSN: 00150193     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1080/00150199908210581     Document Type: Article

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