Piezoelectric properties of PZT films for microcantilever

Sensors and Actuators, A: Physical

Volumn 74, Issue 1, 1999, Pages 60-64

  Cattan, E ^a   Haccart, T ^a   Velu G ^a   Remiens D ^a   Bergaud, C ^b   Nicu, L ^b  

^a UNIVERSITÉ DE VALENCIENNES   (France)

^b LAAS CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COERCIVE FORCE; HYSTERESIS; LEAD COMPOUNDS; MAGNETRON SPUTTERING; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; POLARIZATION; REMANENCE; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

CHARGE AMPLITUDE; DIELECTRIC RESULTS; LEAD ZIRCONATE TITANATE; MORPHOTROPIC PHASE BOUNDARY; PIEZOELECTRIC CONSTANT;

DIELECTRIC FILMS;

EID: 0032664852     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00303-3     Document Type: Article

References (7)

1. Polla D.L., Ye C., Schiller P.J., Tamagawa T., Robbins W.P., Glumac D., Hseuh C.C. Linear motion microactuators using piezoelectric thin films. Proc. Mat. Res. Soc. 243:1992;55.
2. Polla D.L., Schiller P.J. Integrated ferroelectric microelectromechanical systems (MEMS). Int. Ferroelectrics. 7:1995;359.
3. K.R. Udayakumar, J. Chen, A.M. Flynn, S.F. Bart, L.S. Tavrow, D.J. Ehrlich, L.E. Cross, R.A. Brooks, Ferroelectric thin film ultrasonic micromotors, IEEE Ultrasonic Symposium Proceedings, 1991, 58.
4. Deschanvres J.L., Rey P., Delabouglise G., Labeau M., Joubert J.C., Peuzin J.C. Characterization of piezoelectric properties of zinc oxide thin films deposited on silicon for sensors applications. Sensors and Actuators A. 33:1992;43.
5. B. Jaffe, W.R. Cook, H. Jaffe, in Piezoelectric ceramics, Academic Press, London, 1971, pp. 18-19.
6. Jaber B., Remiens D., Cattan E., Tronc P., Thierry B. Characterization of ferroelectric and piezoelectric properties of lead titanate thin films deposited on Si by sputtering. Sensors and Actuators A. 63:1997;91.
7. 31 du PZT en films minces. Ann. Chim. Sci. Mat. 22:1997;669.