Piezoelectric properties of PZT films prepared by the sol-gel method and their application in MEMS

Thin Solid Films

Volumn 516, Issue 16, 2008, Pages 5309-5312

  Xiong, Sibei ^a   Kawada, Hiroshi ^a   Yamanaka, Hiroshi ^a   Matsushima, Tomoaki ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

MEMS; Piezoelectric materials; PZT

Indexed keywords

FILM THICKNESS; MEMS; MICROMACHINING; PIEZOELECTRICITY; SOL-GEL PROCESS; ULTRASONIC SENSORS;

PIEZOELECTRIC COEFFICIENTS; PIEZOELECTRIC THIN FILMS; SENSING ELEMENTS;

THIN FILMS;

EID: 43949136419     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.07.085     Document Type: Article

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