Bottom up fabrication of a nickel-lead zirconate titanate piezoelectric microcantilevers

Materials Letters

Volumn 63, Issue 1, 2009, Pages 88-90

  Rocks, S A ^a   Tredez, Q ^a   Almond, H J ^a   Shaw, C P ^a   Dorey, R A ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

Electroforming; MEMS; Piezoelectric materials; Sol gel preparation; Thick films

Indexed keywords

COLLOIDS; COMPOSITE MICROMECHANICS; ELECTROCHEMISTRY; ELECTROFORMING; ELECTROMECHANICAL DEVICES; ELECTROMETALLURGY; FILM PREPARATION; FILMS; FORMING; GELATION; MEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; NICKEL; NICKEL ALLOYS; PHOTORESISTS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SILICON; THICK FILMS; VIBRATIONS (MECHANICAL);

BENDING; BOTTOM-UP; CANTILEVER STRUCTURES; IMPEDANCE ANALYZERS; INTERNAL STRESSES; LEAD ZIRCONATE TITANATES; MECHANICAL VIBRATIONS; MICROCANTILEVERS; MICROELECTRO-MECHANICAL SYSTEMS; PATTERNING; PIEZOELECTRIC; PROOF OF CONCEPTS; PZT FILMS; RESONANT FREQUENCIES; SILICON SUPPORTS; SOL-GEL PREPARATION;

SEMICONDUCTING LEAD COMPOUNDS;

EID: 54349085515     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2008.09.011     Document Type: Article

References (19)

1. Muralt P. IEEE Trans Ultrason, Ferroelectr Freq Control 47 (2000) 903-915
2. Tressler J.F., Alkoy S., and Newnham R.W. J Electroceram 2 (1998) 257-272
3. Dorey R.A., and Whatmore R.W. J Electroceram 12 (2004) 19-32
4. Tanaka. Microelectron Eng 84 (2007) 1341-1344
5. Dorey R.A., Rocks S.A., Dauchy F., Wang D., Bortolani F., and Hugo E. J Euro Ceram Soc 28 (2008) 1397-1403
6. Muller R.S. Microelectron Eng 53 (2000) 47-54
7. Romig Jr. A.D., Dugger M.T., and McWhorter P.J. Acta Mater 51 (2003) 5837-5866
8. Lui C. Adv Mater 19 (2007) 3783-3790
9. Park J.H., Kwon T.Y., Kim H.J., Kim S.R., Yoon D.S., Cheon C.-I., Kim H., and Kim T.S. J Electroceram 17 (2006) 565-572
10. Xie J., Hu M., Ling S.-F., and Du H. Sens Actuators A 126 (2006) 182-186
11. Walter V., Delobelle P., Le Moal P., Joseph E., and Collet M. Sens Actuators A 96 (2002) 157-166
12. Akedo J., and Lebedev M. Appl Phys Lett 11 (2000) 1710-1712
13. Yi J.W., Shih W.Y., and Shih W.-H. J Appl Phys 92 (2002) 1680-1686
14. Dorey R.A., Stringfellow S.B., and Whatmore R.W. J Euro Ceram Soc 22 (2002) 2921-2926
15. Dauchy F., and Dorey R.A. Int J Adv Manuf Technol 33 (2007) 86-94
16. Duval F.F.C., Dorey R.A., Wright R.W., Huang Z.R., and Whatmore R.W. IEEE Trans Ultrason Ferroelectr Freq Control 51 (2004) 1255-1261
17. Luo J.K., Flewitt A.J., Spearing S.M., Fleck N.A., and Milne W.I. Mater Lett 58 (2004) 2306-2309
18. Revised Nuffield Advanced Science Data Book (1984), Longman, Harlow, UK 058235448X
19. Yi J.W., Shih W.Y., Mutharasan R., and Shih W.-H. J Appl Phys 93 (2003) 619-625