A low-power low-noise dual-chopper amplifier for capacitive CMOS-MEMS accelerometers

IEEE Sensors Journal

Volumn 11, Issue 4, 2011, Pages 925-933

  Sun, Hongzhi ^a   Fang, Deyou ^b   Jia, Kemiao ^b   Maarouf, Fares ^c   Qu, Hongwei ^d   Xie, Huikai ^a  

^a University of Florida   (United States)

^b FREESCALE SEMICONDUCTOR INC   (United States)

^c QUALCOMM INC   (United States)

^d Oakland University   (United States)

Author keywords

Accelerometer; capacitive sensing; chopper stabilization; complementary metal oxide semiconductor microelectromechanical systems (CMOS MEMS); dual chopper amplifier (DCA); microelectromechanical systems (MEMS); monolithic integration

Indexed keywords

CAPACITIVE SENSING; CHOPPER STABILIZATION; COMPLEMENTARY METAL-OXIDE SEMICONDUCTOR-MICROELECTROMECHANICAL SYSTEMS (CMOS-MEMS); DUAL-CHOPPER AMPLIFIER (DCA); MICROELECTROMECHANICAL SYSTEMS; MONOLITHIC INTEGRATION;

ACCELEROMETERS; CHOPPER AMPLIFIERS; CLOCKS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MONOLITHIC INTEGRATED CIRCUITS; STABILIZATION;

COMPOSITE MICROMECHANICS;

EID: 79951534616     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2010.2064296     Document Type: Article

References (27)

1. N. Yazdi, F. Ayazi, and K. Najafi, "Micromachined inertial sensors," Proc. IEEE, vol. 86, no. 8, pp. 1640-1659, Aug. 1998.
2. J. A. Geen, S. J. Sherman, J. F. Chang, and S. R. Lewis, "Single-chip surface micromachined integrated gyroscope with 50 /h Allan deviation," IEEE J. Solid-State Circuits, vol. 37, no. 12, pp. 1860-1866, Dec. 2002.
3. Analog Devices, "ADXL103/ADXL203 Single/dual axis accelerometer datasheet" Cambridge, MA, 2004.
4. ST Microelectronics, "LIS244AL 2-axis- g ultracompact linear accelerometer datashee," Switzerland, 2009.
5. MXA2050A Dual Axis Accelerometer Datasheet. North Andover, MA: MEMSIC, 2007.
6. W. Yun, R. T. Howe, and P. R. Gray, "Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry," in Proc. 5th IEEE Tech. Dig. Solid-State Sensor and Actuator Workshop, 1992, pp. 126-131.
7. C. Lu, M. Lemkin, and B. E. Boser, "A monolithic surface micromachined accelerometer with digital output," in Proc. IEEE Solid-State Circuits Conf. Dig. Tech. Papers, 1995, pp. 160-161.
8. M. Lemkin and B. E. Boser, "A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics," IEEE J. Solid-State Circuits, vol. 34, no. 4, pp. 456-468, Apr. 1999.
9. X. Jiang, F. Wang, M. Kraft, and B. E. Boser, "An integrated surface micromachined capacitive lateral accelerometer with 2 μg/√Hz resolution," in Proc. Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, SC, 2002, pp. 202-205.
10. J.Wu, G. K. Fedder, and L. R. Carley, "A low-noise low-offset capacitive sensing amplifier for a 50 μg/√Hz monolithic CMOS MEMS accelerometer," IEEE J. Solid-State Circuits, vol. 39, no. 5, pp. 722-730, May 2004.
11. N. Yazdi and K. Najafi, "An interface IC for a capacitive silicon g accelerometer," in Proc. IEEE Solid-State Circuits Conf., Dig. Tech. Papers, 1999, pp. 132-133.
12. H. Kulah, J. Chae, N. Yazdi, and K. Najafi, "A multi-step electromechanical δσ converter for micro-g capacitive accelerometers," in Proc. IEEE Solid-State Circuits Conf. Dig. Tech. Papers, 2003, pp. 202-488.
13. J. Chae, H. Kulah, and K. Najafi, "A mono (Pubitemid 40679614)
14. H. Takao, H. Fukumoto, and M. Ishida, "A CMOS integrated threeaxis accelerometer fabricated with commercial submicrometer CMOS technology and bulk-micromachining," IEEE Trans. Electron Devices, vol. 48, no. 9, pp. 1961-1968, Sep. 2001. (Pubitemid 32926694)
15. H. Qu, D. Fang, and H. Xie, "A monolithic CMOS-MEMS 3-axis accelerometer with a low-noise, low-power dual-chopper amplifier," IEEE Sensors J., vol. 8, no. 9, pp. 1511-1518, Sep. 2008.
16. J. Salvia, P. Lajevardi, M. Hemkat, and B. Mrumann, "A 56M CMOS TIA for MEMS applications," in Proc. IEEE Custom Integrated Circuits Conf., 2009, pp. 199-202.
17. A. Sharma, M. F. Zaman, and F. Ayazi, "A 104-dB dynamic range transimpedance-based CMOS ASIC for tuning fork microgyroscopes," IEEE J. Solid-State Circuits, vol. 42, no. 8, pp. 1790-1802, Aug. 2007. (Pubitemid 47171139)
18. G. K. Fedder, "Simulation of microelectromechanical systems," Ph.D. dissertation, Elect. Eng. Comput. Sci. Dept., Univ. California at Berkeley, Berkeley, CA, 1994.
19. H.Kulah, A. Salian, N.Yazdi, and K. Najafi, "A 5Vclosed-loop second order sigma-delta micro-g micro accelerometer," in Proc. Solid-State Sensors and Actuators Workshop, Hilton Head Island, SC, 2002, pp. 219-222.
20. R. R. Harrison and C. Charles, "A low-power low-noise CMOS amplifier for neural recording applications," IEEE J. Solid-State Circuits, vol. 38, no. 6, pp. 958-965, Jun. 2003.
21. A. Bakker, K. Thiele, and J. H. Huijsing, "A CMOS nested-chopper instrumentation amplifier with 100-nV offset," IEEE J. Solid-State Circuits, vol. 35, no. 12, pp. 1877-1883, Dec. 2000. (Pubitemid 32138757)
22. D. Fang, H. Qu, and H. Xie, "A 1 mWdual-chopper amplifier for a 50 μg/Hz monolithic CMOS-MEMS capacitive accelerometer," in Proc. Symp. VLSI Circuits. Dig. Tech. Papers, 2006, pp. 59-60. (Pubitemid 351306272)
23. H. Sun, F. Maarouf, D. Fang, K. Jia, and H. Xie, "An improved lowpower low-noise dual-chopper amplifier for capacitive CMOS-MEMS accelerometers," in Proc. 3rd IEEE Int. Conf. Nano/Micro Engineered and Molecular Systems, 2008, pp. 1075-1080.
24. H. Qu, D. Fang, and H. Xie, "A single-crystal silicon 3-axis CMOSMEMS accelerometer," in Proc. IEEE Sensors, 2004, pp. 661-664. (Pubitemid 41675729)
25. H. Qu and H. Xie, "Process development for CMOS-MEMS sensors with robust electrically isolated bulk silicon microstructures," J. Microelectromech. Syst., vol. 16, no. 5, pp. 1152-1161, Oct. 2007. (Pubitemid 47528012)
26. Kionix Inc., "KXP94 ± g tri-axis accelerometer specifications," Ithaca, NY, 2007.
27. Colibrys Ltd., "MS8000.D datasheet," Switzerland.