A single-crystal silicon 3-axis CMOS-MEMS accelerometer

Proceedings of IEEE Sensors

Volumn 2, Issue , 2004, Pages 661-664

  Qu, Hongwei ^a   Fang, Deyou ^a   Xie, Huikai ^a  

^a University of Florida   (United States)

Author keywords

3 Axis accelerometer; Aluminum etching; CMOS MEMS; Integrated accelerometer

Indexed keywords

CMOS INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; MONOLITHIC INTEGRATED CIRCUITS; MULTILAYERS; SILICON; SINGLE CRYSTALS;

3-AXIS ACCELEROMETER; ALUMINUM ETCHING; CMOS-MEMS; INTEGRATED ACCELEROMETER;

ACCELEROMETERS;

EID: 27944492426     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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