An improved low-power low-noise dual-chopper amplifier for capacitive CMOS-MEMS accelerometers

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Volumn , Issue , 2008, Pages 1075-1080

  Sun, Hongzhi ^a   Maarouf, Fares ^a   Fang, Deyou ^a   Jia, Kemiao ^a   Xie, Huikai ^a  

^a University of Florida   (United States)

Author keywords

CMOS MEMS accelerometer; Dual chopper amplifier; Low noise; Low power; Three axis accelerometer

Indexed keywords

ACCELEROMETERS; CHLORINE COMPOUNDS; CHOPPER AMPLIFIERS; COMPOSITE MICROMECHANICS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; PHOTORESISTS;

ACTIVE LOADS; BAND-GAP VOLTAGE; BONDING PADS; CMOS-MEMS ACCELEROMETER; CMOS-MEMS ACCELEROMETERS; DUAL-CHOPPER AMPLIFIER; EXTERNAL CIRCUITS; INTERNATIONAL CONFERENCES; LOW NOISE; LOW POWER; LOW POWERS; MOLECULAR SYSTEMS; ON CHIPS; TEMPERATURE SENSITIVITIES; THREE-AXIS; THREE-AXIS ACCELEROMETER;

AMPLIFIERS (ELECTRONIC);

EID: 50249167790     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2008.4484505     Document Type: Conference Paper

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