A CMOS integrated three-axis accelerometer fabricated with commercial submicrometer CMOS technology and bulk-micromachining

IEEE Transactions on Electron Devices

Volumn 48, Issue 9, 2001, Pages 1961-1968

  Takao, Hidekuni ^a   Fukumoto, Hirofumi ^b   Ishida, Makoto ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b ASAHI KASEI CORPORATION   (Japan)

Author keywords

Acceleration measurement; CMOS integrated circuits; Intelligent sensors; Micromachining; MOSFETs; Piezoresistive devices

Indexed keywords

ACCELERATION; ACCELEROMETERS; ETCHING; MICROMACHINING; MOSFET DEVICES; SILICON WAFERS;

CMOS INTEGRATED THREE-AXIS ACCELEROMETER; INTELLIGENT SENSORS; PIEZORESISTIVE DEVICES;

CMOS INTEGRATED CIRCUITS;

EID: 0035445594     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.944183     Document Type: Article

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